Semiconductor manufacturing apparatus

Abstract

A semiconductor manufacturing apparatus includes: a disk-shaped holding part for holding a semiconductor substrate with its fist surface; a rotation shaft having an end placed at a second surface of the holding part; a rotatable terminal provided at the other end of the rotation shaft and rotating with the holding part; a fixed terminal for applying current or a voltage to the semiconductor substrate through the rotatable terminal, the fixed terminal being in contact with the rotatable terminal to form a sliding surface perpendicularly to the rotation shaft and electrically connected to a power supply; and a sensor part for detecting a rotational state of the rotation shaft. Protection means for protecting the sensor part against fine particles produced at an interface between the fixed terminal and the rotatable terminal is provided between the sliding surface and the holding part.

1 . A semiconductor manufacturing apparatus, comprising: 
 a disk-shaped holding part having a first surface and a second surface, a semiconductor substrate being held with the fist surface;    a rotation shaft having an end placed at the second surface of the holding part;    a rotatable terminal provided at the other end of the rotation shaft and rotating with the holding part;    a fixed terminal for applying current or a voltage to the semiconductor substrate through the rotatable terminal, the fixed terminal being in contact with the rotatable terminal to form a sliding surface perpendicularly to the rotation shaft and electrically connected to a power supply;    a sensor part for detecting a rotational state of the rotation shaft; and    protection means for protecting the sensor part against fine particles produced at an interface between the fixed terminal and the rotatable terminal, the protection means being provided between the sliding surface and the holding part.    
     
     
         2 . The apparatus of  claim 1 , wherein the protection means is a plate-shaped member provided between the sliding surface and the sensor part and blocks a scattering path of the fine particles.  
     
     
         3 . The apparatus of  claim 1 , wherein the protection means is a film member provided between the sliding surface and the sensor part and blocks a scattering path of the fine particles.  
     
     
         4 . The apparatus of  claim 3 , wherein the film member has an adhesive property.  
     
     
         5 . The apparatus of  claim 1 , wherein the protection means is a C-shaped member having a substantially C-shaped cross section and provided around the rotation shaft to surround the sliding surface.  
     
     
         6 . The apparatus of  claim 1 , wherein the protection means is a suction mechanism for sucking the fine particles.  
     
     
         7 . The apparatus of  claim 6 , wherein the suction mechanism has an inlet, and 
 the inlet is placed to face the sliding surface.    
     
     
         8 . The apparatus of  claim 1 , wherein the protection means has a nozzle placed near the sensor part and causes a jet of gas from the nozzle.  
     
     
         9 . The apparatus of  claim 8 , wherein the nozzle has a tip facing the sensor part.  
     
     
         10 . The apparatus of  claim 8 , wherein the gas is nitrogen gas.  
     
     
         11 . The apparatus of  claim 1 , wherein the sensor part includes: a disk-shaped index wheel mounted on the rotation shaft; and an index sensor for detecting a position of the index wheel, and 
 the protection means is a first brush member provided for the index sensor and used for cleaning an upper face of the index wheel.    
     
     
         12 . The apparatus of  claim 11 , wherein the index sensor is an optical sensor having a light-emitting portion and a light-receiving portion, and 
 the protection means includes a second brush member provided for the index wheel and used for cleaning at least one of the light-emitting portion and the light-receiving portion.    
     
     
         13 . The apparatus of  claim 1 , wherein the sensor part includes a disk-shaped index wheel mounted on the rotation shaft and an index sensor for detecting a position of the index wheel, and 
 the protection means is an index-sensor covering member covering the index sensor.    
     
     
         14 . The apparatus of  claim 1 , wherein the protection means includes a flame member surrounding the fixed terminal, the rotatable terminal and the rotation shaft, using the rotation shaft as a center, and 
 the sensor part includes a disk-shaped index wheel mounted on the rotation shaft and an index sensor which is a proximity sensor provided outside the flame member and used for detecting a position of the index wheel.    
     
     
         15 . The apparatus of  claim 1 , wherein the fixed terminal has a recess with which the rotatable terminal is jointed.  
     
     
         16 . The apparatus of  claim 1 , wherein the fixed terminal and the rotatable terminal contain tough pitch copper.