Container box for framed pellicle

Abstract

There is provided a pellicle container for use in photolithography, with which no dust particles are deposited onto the pellicle contained therein, and contamination of the pellicle can be prevented and good condition is ensured. The present invention provides a pellicle container consisting of a container base on which a pellicle is mounted, and a covering body that covers the pellicle and latches with the container base by engagement together with the container base along the peripheral edges, wherein the pellicle is supported by inserting a frame supporting pin in the opening of a sleeve provided on the outside surface of the pellicle frame. Preferably, the container base is made from a plastic resin and a metal component is joined to the container base; the metal component fixedly connected to the container base is mechanically connected to a positioning component that positions the frame supporting pin that supports the pellicle; and an elastic member is disposed on the point of contact between the frame supporting pin that supports the pellicle and the pellicle frame. It is even more preferable that the container boase and the Icovering body are made of a plastic resin, and these have antistatic performance such that their surface resistivity is no higher than 1×10 12 ohms.

1 . A container of a photolithographic framed pellicle consisting of a container base and a covering body each engageable with the other along the peripheries to form a closed space therebetween, which is further provided with at least three pin sleeves fixedly connected onto the upper surface of the container base in such a fashion as to allow a pellicle frame-supporting pin inserted into the pin sleeve to reach a cavity formed in the frame of the framed pellicle when a framed pellicle is contained in the pellicle container.  
   
   
       2 . The pellicle container as claimed in  claim 1  wherein the container base and the covering body are formed from a plastic resin and the pin sleeves are formed from a metallic material.  
   
   
       3 . The pellicle container as claimed in  claim 1  wherein the pin sleeves are each fixedly connected to the container base by a mechanical means.  
   
   
       4 . The pellicle container as claimed in  claim 1  wherein the pellicle supporting pinn is provided with an elastomeric member at the point, with intervention of which the pin comes into contact with the cavity in the pellicle frame  6 .  
   
   
       5 . The pellicle container as claimed in  claim 2  wherein the container base and the covering body made from a plastic resin have a surface resistivity not exceeding 1×10 12  ohms.