Glow discharge drilling apparatus and glow discharge drilling method

Abstract

A glow discharge drilling apparatus enables switching of a continuous mode for continuously supplying electric power and an intermittent mode for intermittently supplying electric power. Electric power is supplied in the intermittent mode with respect to a sample easily melted by a heat due to a glow discharge and a sample easily broken by a force of sputtering due to a glow discharge or the like, whereby the sample is drilled so that an observation face capable of carrying out good observation can be obtained. When the sample is not easily melted and easily broken, the sample is drilled so that a good observation face can be efficiently obtained by supplying electric power in the continuous mode.

1 . A glow discharge drilling apparatus for, in an atmosphere in which inert gas is supplied, drilling a sample disposed to be opposed to an electrode by means of a glow discharge generated by supplying electric power to the electrode and sample, said apparatus comprising: 
 a sealing member for surrounding and sealing a space at which the electrode and sample are opposed to each other;    a gas supply section for supplying inert gas to the space sealed by the sealing member; and    a controller for controlling such that electric power is supplied intermittently.    
     
     
         2 . The glow discharge drilling apparatus according to  claim 1 , wherein said controller further controls such that electric power is supplied continuously, and is capable of switching continuous electric power supply and intermittent electric power supply.  
     
     
         3 . The glow discharge drilling apparatus according to  claim 1 , wherein said controller is capable of: 
 changing a state relevant to intermittent electric power supply.    
     
     
         4 . The glow discharge drilling apparatus according to  claim 3 , wherein said controller is further capable of: 
 changing the number of the times per unit time electric power is supplied.    
     
     
         5 . The glow discharge drilling apparatus according to  claim 3 , wherein said controller is further capable of: 
 changing a duty ratio relevant to intermittent electric power supply.    
     
     
         6 . The glow discharge drilling apparatus according to  claim 3 , wherein said controller is further capable of: 
 changing an electric power value relevant to intermittent electric power supply.    
     
     
         7 . A glow discharge drilling apparatus for, in an atmosphere in which inert gas is supplied, drilling a sample disposed to be opposed to an electrode by means of a glow discharge generated by supplying electric power to the electrode and sample, said apparatus comprising: 
 a sealing member for surrounding and sealing a space at which the electrode and sample are opposed to each other;    a gas supply section for supplying inert gas to the space sealed by the sealing member; and    intermittent electric power supply means for intermittently supplying electric power.    
     
     
         8 . A glow discharge drilling apparatus having a first electrode and a second electrode on which a sample is disposed in a drilling processing chamber to which inert gas is supplied, said apparatus drilling the sample by means of a glow discharge generated by supplying electric power to the first electrode and the second electrode, comprising: 
 a controller for controlling such that electric power is supplied intermittently; and such that electric power is supplied continuously, and capable of switching continuous electric power supply and intermittent electric power supply.    
     
     
         9 . The glow discharge drilling apparatus according to  claim 8 , wherein said controller is further capable of: 
 changing a state relevant to intermittent electric power supply.    
     
     
         10 . The glow discharge drilling apparatus according to  claim 9 , wherein said controller is further capable of: 
 changing the number of the times per unit time electric power is supplied.    
     
     
         11 . The glow discharge drilling apparatus according to  claim 9 , wherein said controller is further capable of: 
 changing a duty ratio relevant to intermittent electric power supply.    
     
     
         12 . The glow discharge drilling apparatus according to  claim 9 , wherein said controller is further capable of: 
 changing an electric power value relevant to intermittent electric power supply.    
     
     
         13 . A glow discharge drilling apparatus having a first electrode and a second electrode on which a sample is disposed in a drilling processing chamber to which inert gas is supplied, said apparatus drilling the sample by means of a glow discharge generated by supplying electric power to the first electrode and the second electrode, comprising: 
 intermittent electric power supply means for intermittently supplying electric power;    continuous electric power supply means for continuously supplying electric power; and    switching means for switching the continuous electric power supply carried out by the continuous electric power supply means and the intermittent electric power supply carried out by the intermittent electric power supply means.    
     
     
         14 . A glow discharge drilling apparatus having a first electrode and a second electrode on which a sample is disposed in a drilling processing chamber to which inert gas is supplied, said apparatus drilling the sample by means of a glow discharge generated by supplying electric power to the first electrode and the second electrode, comprising: 
 a controller for controlling such that electric power is supplied intermittently, and capable of changing a state relevant to intermittent electric power supply.    
     
     
         15 . The glow discharge drilling apparatus according to  claim 14 , wherein said controller is further capable of: 
 changing the number of the times per unit time electric power is supplied.    
     
     
         16 . The glow discharge drilling apparatus according to  claim 14 , wherein said controller is further capable of: 
 changing a duty ratio relevant to intermittent electric power supply.    
     
     
         17 . The glow discharge drilling apparatus according to  claim 14 , wherein said controller is further capable of: 
 changing an electric power value relevant to intermittent electric power supply.    
     
     
         18 . A glow discharge drilling apparatus having a first electrode and a second electrode on which a sample is disposed in a drilling processing chamber to which inert gas is supplied, said apparatus drilling the sample by means of a glow discharge generated by supplying electric power to the first electrode and the second electrode, comprising: 
 intermittent electric power supply means for intermittently supplying electric power; and    electric power supply state change means for changing a state relevant to the intermittent electric power supply carried out by the intermittent electric power supply means.    
     
     
         19 . A glow discharge drilling method for disposing a sample to be opposed to an electrode, supplying inert gas, supplying electric power to the electrode and sample to generate a glow discharge, and drilling the sample by the generated glow discharge, said method comprising the steps of: 
 surrounding and sealing a space at which the electrode and sample are opposed to each other; and    intermittently supplying electric power in an atmosphere in which inert gas is supplied to the space formed by sealing.    
     
     
         20 . A glow discharge drilling method for supplying inert gas into a drilling processing chamber having a first electrode and a second electrode on which a sample is disposed, supplying electric power to the first electrode and the second electrode to generate a glow discharge, and drilling the sample by the generated glow discharge, said method comprising the step of: 
 the intermittent electric power supply step of intermittently supplying electric power, wherein a state relevant to intermittent electric power supply can be changed in the intermittent electric power supply step.    
     
     
         21 . A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between an electrode and the sample disposed to be opposed to the electrode, said apparatus comprising: 
 a measuring section for measuring a drilled depth by carrying out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site.    
     
     
         22 . The glow discharge drilling apparatus according to  claim 21 , wherein a penetrating portion is provided on the electrode at a portion opposed to a sample, and wherein the measuring section is designed to carry out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site through the penetrating portion.  
     
     
         23 . The glow discharge drilling apparatus according to  claim 22 , further comprising a holding member for holding the electrode, and having a cavity that communicates with the penetrating portion of the electrode; and a light transmitting member opposed to the penetrating portion via the cavity, and wherein the measuring section is designed to carry out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site through the light transmitting member, the cavity and the penetrating portion.  
     
     
         24 . The glow discharge drilling apparatus according to  claim 23 , wherein the measuring section comprises an irradiation and light receiving section for carrying out light irradiation and light receiving of reflection light, and wherein the irradiation and light receiving section is disposed in parallel to the holding member so as to be opposed to the light transmitting member, and the measuring section comprises a light shielding member for shielding light by covering the irradiation and light receiving section and the light transmitting member.  
     
     
         25 . The glow discharge drilling apparatus according to  claim 21 , further comprising a main controller capable of stopping voltage application when the measuring section carries out light receiving of reflection light.  
     
     
         26 . The glow discharge drilling apparatus according to  claim 21 , further comprising a controller for controlling such that a voltage is intermittently applied, wherein the measuring section is designed so as to carry out light receiving of reflection light when voltage application is intermitted while a voltage is intermittently applied.  
     
     
         27 . The glow discharge drilling apparatus according to  claim 21 , further comprising: 
 an accepting section for accepting a drilled depth; and    a main controller capable of making comparative determination of a drilled depth accepted by the accepting section and a drilled depth measured by the measuring section; and    in the case where it is determined that the drilled depth measured by the measuring section reaches the drilled depth accepted by the accepting section, stopping voltage application and terminating drilling.    
     
     
         28 . The glow discharge drilling apparatus according to  claim 21 , wherein the measuring section comprises: 
 an irradiation and light receiving section for irradiating a plurality of light beams and receiving a plurality of reflection light beams; and    a measurement control section for calculating an average value of a plurality of drilled depths based on a plurality of the received reflection light beams.    
     
     
         29 . A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between an electrode and the sample disposed to be opposed to the electrode, said apparatus comprising: 
 measuring means for measuring a drilled depth by carrying out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site.    
     
     
         30 . A glow discharge drilling method for drilling a sample by a glow discharge generated by applying a voltage between an electrode and the sample disposed to be opposed to the electrode, said method comprising the steps of: 
 measuring a drilled depth by carrying out light irradiation to a drilled site and light receiving of reflection light reflected on the drilled site; and    stopping voltage application and terminate drilling according to the measured drilled depth.    
     
     
         31 . A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between a hollow electrode and the sample disposed to be opposed to the hollow electrode, said apparatus comprising: 
 an infrared ray sensor for receiving an infrared ray radiated from a drilled site of the sample, the infrared ray having passed through a hollow portion of the hollow electrode; and    a temperature measuring section for measuring a temperature of a drilled site of the sample based on the infrared ray received by the infrared ray sensor.    
     
     
         32 . The glow discharge drilling apparatus according to  claim 31 , further comprising a moving section for moving the infrared ray sensor so that a light receiving section of the infrared ray sensor can be made close to or distant from the drilled site of the sample.  
     
     
         33 . The glow discharge drilling apparatus according to  claim 31 , further comprising a holding member for holding the hollow electrode, and having a cavity that communicates with the hollow portion of the hollow electrode and a light transmitting member opposed to the hollow portion via the cavity, and wherein the infrared ray sensor is designed to receive an infrared ray having passed through the hollow portion, the cavity, and the light transmitting member.  
     
     
         34 . The glow discharge drilling apparatus according to  claim 33 , further comprising a light shielding member for shielding light by covering the infrared ray sensor and the light transmitting member.  
     
     
         35 . The glow discharge drilling apparatus according to  claim 31 , further comprising a main controller capable of stopping voltage application when the temperature measuring section measures a temperature.  
     
     
         36 . The glow discharge drilling apparatus according to  claim 31 , further comprising a controller for controlling such that a voltage is intermittently applied, wherein the temperature measuring section is designed to measure a temperature based on an infrared ray received by the infrared ray sensor when voltage application is intermitted while a voltage is intermittently applied.  
     
     
         37 . The glow discharge drilling apparatus according to  claim 31 , further comprising: 
 an accepting section for accepting a reference temperature; and    a main controller capable of:    making comparative determination of the reference temperature accepted by the accepting section and a temperature measured by the temperature measuring section; and    in the case where it is determined that the temperature measured by the temperature measuring section is equal to or greater than the reference temperature accepted by the accepting section, lowering a value associated with an applied voltage.    
     
     
         38 . The glow discharge drilling apparatus according to  claim 31 , further comprising: 
 a controller for controlling such that a voltage is intermittently applied;    an accepting section for accepting a reference temperature;    a main controller capable of    making comparative determination of the reference temperature accepted by the accepting section and a temperature measured by the temperature measuring section; and    in the case where it is determined that the temperature measured by the temperature measuring section is equal to or greater than the reference temperature accepted by the accepting section, lowering a duty ratio relevant to voltage application while a voltage is intermittently applied and/or an electric power value relevant to an applied voltage, wherein the temperature measuring section is designed to measure a temperature based on the infrared ray received by the infrared ray sensor when voltage application is intermitted while a voltage is intermittently applied.    
     
     
         39 . A glow discharge drilling apparatus for drilling a sample by a glow discharge generated by applying a voltage between a hollow electrode and the sample disposed to be opposed to the hollow electrode, said apparatus comprising: 
 an infrared ray sensor for receiving an infrared ray radiated from a drilled site of the sample, the infrared ray having passed through a hollow portion of the hollow electrode; and    temperature measuring means for measuring a temperature of a drilled site of the sample based on the infrared ray received by the infrared ray sensor.    
     
     
         40 . A glow discharge drilling method for drilling a sample by a glow discharge generated by applying a voltage between a hollow electrode and the sample disposed to be opposed to the hollow electrode, said method comprising the steps of: 
 receiving an infrared ray radiated from a drilled site of the sample, the infrared ray having passed through a hollow portion of the hollow electrode;    measuring a temperature of a drilled site of the sample based on the received infrared ray;    comparing the measured temperature and a reference temperature accepted in advance; and    in the case where it is determined that the measured temperature is equal to or greater than the reference temperature as a result of the comparison, lowering a value associated with an applied voltage.