Novel polymer compound, precursor for the same and thin film-forming method using the same polymer precursor

Abstract

Provided are polyimide and a thin film thereof which have a three-dimensional structure and therefore are excellent in a mechanical strength and a heat resistance as compared with those of conventional linear polyimide. The polyimide is obtained from a salt of multifunctional amine represented by Formula (1): (wherein A represents a tetravalent organic group, and n represents an integer of 0 to 3) and tetracarboxylic diester represented by Formula (2): (wherein B represents a tetravalent organic group having 1 to 20 carbon atoms, and R 1 and R 2 each represent independently an alkyl group having 1 to 5 carbon atoms).

1 - 21 . (canceled)  
   
   
       22 . A polyimide represented by Formula (4):  
     
       
         
         
             
             
         
       
     
     (wherein A represents a tetravalent organic group; B represents a tetravalent organic group having 1 to 20 carbon atoms; and n represents an integer of 0 to 3).  
   
   
       23 . The polyimide as described in  claim 22 , wherein A in Formula (4) is an adamantane skeleton.  
   
   
       24 . (canceled)  
   
   
       25 . The polyimide as described in  claim 22 , wherein B in Formula (4) is a benzene ring or a biphenyl ring.  
   
   
       26 . The polyimide as described in any of  claim 23 , wherein B in Formula (4) is a benzene ring or a biphenyl ring.  
   
   
       27 . (canceled)  
   
   
       28 . A polyimide having the three-dimensional structure represented by Formula (3):  
     
       
         
         
             
             
         
       
     
   
   
       29 - 30 . (canceled)  
   
   
       31 . A polyimide represented by Formula (5):  
     
       
         
         
             
             
         
       
     
   
   
       32 - 41 . (canceled)