Fabrication technique of micro spray nozzles

Abstract

A method for manufacturing a micro nozzle is disclosed. The method includes the following steps: providing a substrate having a channel for fluids, wherein the thickness of the substrate is D 1 and the depth of the bottom of the channel is D 3 ; forming a protrusion having an acute angle θ on the edge of the substrate through the cutting operation; and further forming a nozzle with a thickness D 2 of on the tip of the protrusion. The outlet of the channel is located on the tip of the protrusion. Moreover, the thickness of the nozzle on the tip of the protrusion is less than the depth of the channel or than the thickness of the substrate. The micro nozzle made by the method illustrated above can provide a reliable and stable interface for electro-spraying.

1 . A method for manufacturing a micro spray nozzle, comprising the following steps: 
 providing a substrate having at least one channel for fluids, wherein the thickness of the substrate is D 1 , and the depth from the bottom of the channel for fluids to the surface of the substrate is D 3 ;    utilizing a cutting tool to cut the substrate, forming a prism having an angle θ, wherein the angle θ is not greater than 90°; and    utilizing the cutting tool to cut the angle θ of the prism to form a spray nozzle having a thickness of D 2,  whereby an egress of the channel for fluids is positioned in the spray nozzle;    wherein the thickness D 2  of the spray nozzle is smaller than the thickness D 1  of the substrate; the depth D 3  of the channel for the fluids is smaller than the thickness D 1  of the substrate.    
   
   
       2 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the depth D 3  of the channel for the fluids is greater than the half value of the difference between D 1  and D 2 .  
   
   
       3 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the substrate is formed by bonding at least two pieces of substrates.  
   
   
       4 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the thickness D 1  is approximately between 50 μm and 1500 μm.  
   
   
       5 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the thickness D 2  is approximately between 5 μm and 500 μm.  
   
   
       6 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the angle θ is approximately between 3° and 88°.  
   
   
       7 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the cross-section is U-shape, V-shape, square, or semi-circular.  
   
   
       8 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the cutting tool is a wheel knife.  
   
   
       9 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the material of the substrate can be silicon, glass, ceramic, polymer, plastics, or a combination of the aforementioned materials.  
   
   
       10 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the spray nozzle is used to absorb one liquid, gas, colloid, or their combinations.  
   
   
       11 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the spray nozzle is used to spray or discharge one liquid, gas, colloid, or their combinations.  
   
   
       12 . The method for manufacturing a micro spray nozzle as claimed in  claim 1 , wherein the spray nozzle is integrated to a electrospray mass spectrometer.