Gravity-fed in-line continuous processing system and method

Abstract

A method for coating substrates includes providing at least one processing chamber and disposing the processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock. The method further includes isolating the processing chamber from the first load lock, isolating the processing chamber from the second load lock, and providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.

1 . A method for coating substrates, the method comprising: 
 providing at least one processing chamber;    disposing the at least one processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock;    isolating the processing chamber from the first load lock;    isolating the processing chamber from the second load lock; and    providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.    
     
     
         2 . The method of  claim 1  in which the step of isolating the processing chamber from the first load lock is carried out by a first device.  
     
     
         3 . The method of  claim 1  in which the step of isolating the processing chamber from the second load lock is carried out by a second device.  
     
     
         4 . The method of  claim 1  further including the step of angling the processing chamber, the first load lock and the second load lock with respect to the horizontal.  
     
     
         5 . The method of  claim 4  in which the angle with respect to the horizontal is greater than 33° but less than 43°.  
     
     
         6 . The method of  claim 5  in which the angle with respect to the horizontal is about 40°.  
     
     
         7 . The method of  claim 1  further including the step of angling the at least one track with respect to the horizontal.  
     
     
         8 . The method of  claim 1  in which the first load lock is an input load lock.  
     
     
         9 . The method of  claim 1  in which the second load lock is an output load lock.  
     
     
         10 . The method of  claim 1  further including the step of structuring and arranging the first device to prevent the article from sliding under the force of gravity when the first device is closed.  
     
     
         11 . The method of  claim 1  further including the step of structuring and arranging the second device to prevent the article from sliding under the force of gravity when the second device is closed.  
     
     
         12 . The method of  claim 1  further including the step of structuring and arranging the first device to allow the article to slide on the track from the first load lock to the processing chamber when the first device is open.  
     
     
         13 . The method of  claim 1  further including the step of structuring and arranging the second device to allow the article to slide on the track from the processing chamber to the second load lock when the second device is open.  
     
     
         14 . The method of  claim 1  in which the first device is a first rotary barrel gate valve.  
     
     
         15 . The method of  claim 14  in which the second device is a second rotary barrel gate valve.  
     
     
         16 . The method of  claim 1  further including the step of providing a plurality of tracks through the processing chamber and the first and second load locks.  
     
     
         17 . The method of  claim 16  further including the step of angling all tracks with respect to the horizontal.  
     
     
         18 . The method of  claim 17  further including the step of structuring and arranging each of the plurality of tracks such that articles in each of the plurality of tracks slide thereon under the force of gravity for simultaneously processing a plurality of articles.  
     
     
         19 . The method of  claim 18  in which the plurality of tracks are parallel to one another.  
     
     
         20 . The method of  claim 18  further including the step of aligning the parallel tracks of the first load lock, the tracks of the processing chamber, and the tracks of the second load lock with one another.  
     
     
         21 . The method of  claim 1  further including the step of disposing an input tray adjacent the first load lock.  
     
     
         22 . The method of  claim 1  further including the step of disposing an output tray adjacent the second load lock.  
     
     
         23 . The method of  claim 1  further including the step of structuring and arranging the first load lock for alternating between a first pressure and a second pressure.  
     
     
         24 . The method of  claim 23  wherein the first pressure is a vacuum and the second pressure is atmospheric pressure.  
     
     
         25 . The method of  claim 1  further including the step of structuring and arranging the second load lock for alternating between a first pressure and a second pressure.  
     
     
         26 . The method of  claim 25  wherein the first pressure is a vacuum and the second pressure is atmospheric pressure.  
     
     
         27 . The method of  claim 1  further including the step of providing a third device between the first load lock and atmosphere.  
     
     
         28 . The method of  claim 1  further including the step of providing a fourth device between the second load lock and atmosphere.  
     
     
         29 . The method of  claim 27  in which the third device is a third rotary barrel gate valve.  
     
     
         30 . The method of  claim 28  in which the fourth device is a fourth rotary barrel gate valve.  
     
     
         31 . The method of  claim 1  further including the step of sequencing the first load lock, the second load lock, the first device, the second device and the processing chamber such that sets of articles may be processed simultaneously.  
     
     
         32 . A method for processing a plurality of articles simultaneously, the method comprising: 
 providing at least one processing chamber;    disposing the at least one processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock;    isolating the processing chamber from the first load lock;    isolating the processing chamber from the second load lock; and    providing a plurality of tracks through the processing chamber and the first and second load locks and structuring and arranging the tracks such that articles slide thereon under the force of gravity.    
     
     
         33 . A method for processing sets of articles in a system simultaneously, the method comprising: 
 providing at least one processing chamber;    disposing the at least one processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock, with a plurality of tracks through the processing chamber and the first and second load locks such that sets of articles slide on the tracks under the force of gravity into the first load lock, through the processing chamber, and then into and out of the second load lock;    isolating the processing chamber from the first and second load locks while simultaneously processing sets of articles; and    sequencing the operation of the processing chamber and the first and second load locks to process the sets of articles in the system simultaneously.    
     
     
         34 . A method for coating substrates, the method comprising: 
 providing at least one processing chamber;    disposing the at least one processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock;    isolating the processing chamber from the first load lock via a first rotary barrel gate valve;    isolating the processing chamber from the second load lock via a second rotary barrel gate valve; and    providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.