Electrolyzing electrode and production method of persulfuric acid-dissolving liquid by use of the electrode

Abstract

An object is to provide an electrolyzing electrode capable of electrolyzing water with a low current density to thereby produce ozone water with a high efficiency. An ozone producing electrode comprises: a substrate; and a surface layer formed on the surface of the substrate and including a dielectric material, and the surface layer is formed to have a thickness which is larger than 0 and is 2000 nm or less. Especially, the substrate is constituted of a conductive material, the dielectric material constituting the surface layer is made of a tantalum oxide or an aluminum oxide, and an electrolytic solution is electrolyzed with the low current density to thereby produce ozone with the high efficiency.

1 . An electrolyzing electrode comprising: 
 a substrate; and    a surface layer formed on the surface of the substrate and including a dielectric material,    the surface layer being formed to have a thickness which is larger than 0 and is 2000 nm or less.    
   
   
       2 . The electrolyzing electrode according to  claim 1 , wherein the substrate is a conductive substrate.  
   
   
       3 . The electrolyzing electrode according to  claim 1  or  2 , wherein on the substrate, there is formed an intermediate layer positioned on an inner side of the surface layer, formed on the surface of the substrate, and containing at least one of an oxidization retarding metal, a metal oxide having conductivity and a metal having conductivity even when oxidized.  
   
   
       4 . The electrolyzing electrode according to  claim 1 ,  2  or  3 , wherein the dielectric material included in the surface layer is an oxide.  
   
   
       5 . The electrolyzing electrode according to  claim 4 , wherein the oxide is tantalum oxide or aluminum oxide.  
   
   
       6 . The electrolyzing electrode according to  claim 1 ,  2 ,  3 ,  4  or  5 , wherein the surface layer is constituted by forming a surface layer constituting material on the surface of the substrate by a sputtering process.  
   
   
       7 . The electrolyzing electrode according to  claim 3 ,  4 ,  5  or  6 , wherein the intermediate layer is constituted by forming an intermediate layer constituting material on the surface of the substrate by the sputtering process.  
   
   
       8 . A production method of a persulfuric acid-dissolving liquid by electrolyzing an aqueous solution containing sulfate ions to produce a persulfuric acid-dissolving liquid, 
 wherein the electrolyzing electrode according to any one of  claims 1  to  7  is used as an anode.