System and method for a subambient pressure air bearing slider utilizing negative pressure grooves

Abstract

A system and method are disclosed for a subambient pressure air bearing slider utilizing negative pressure grooves. In one embodiment, a groove extends from a slider's leading edge, splits, and terminates in two locations at the slider's trailing edge. In one embodiment, a groove is provided in a slider's compression pad near the trailing edge of the slider.

1 - 7 . (canceled)  
   
   
       8 . A method for manufacturing a slider comprising: 
 forming a first and second rail on a first structure at a first depth from said first and second rails;    forming a first groove segment in said first structure to a groove depth, said groove depth being greater than said first depth;    forming a second and third groove segment in said first structure to said groove depth, said first groove segment extending from the leading edge of the body and between said first and second rails, and said second and third groove segments extending from said first groove segment to a trailing edge of the body.    
   
   
       9 . The method of  claim 8 , wherein said forming said rails and said groove segments is by masked etching.  
   
   
       10 . The method of  claim 8 , further comprising forming a second structure between a portion of said first and second rails at a second depth, said first depth being greater than said second depth and said first groove segment being in said first and second structures to said groove depth.  
   
   
       11 . The method of  claim 8 , further comprising forming a third structure disposed proximately to the trailing edge of said slider body.  
   
   
       12 . The method of  claim 10 , wherein said second and third groove segments extend from said first groove segment to the trailing edge of the body on opposite sides of the third structure.  
   
   
       13 . The method of  claim 11 , wherein said second and third groove segments are each generally ‘L’-shaped, each having one generally 90° bend.  
   
   
       14 . The method of  claim 11 , wherein said second and third groove segments each have a bend angled less than 90°.  
   
   
       15 . The method of  claim 11 , wherein said second and third groove segments generally form a ‘U’-shape, each groove segment having two bends with bend angles combining to total approximately 90° for each groove segment.  
   
   
       16 - 25 . (canceled)  
   
   
       26 . A method of manufacturing a slider comprising: 
 forming a first and second rail on a first structure at a first depth from said first and second rails;    forming a third structure on said first structure disposed proximately to the trailing edge of said slider body; and    forming a groove to said first depth in and extending across said third structure in a direction generally perpendicular to the first and second rails.    
   
   
       27 . The method of  claim 26 , wherein a wall of said groove is stair-stepped.  
   
   
       28 . The method of  claim 26 , wherein said groove is arcuate.  
   
   
       29 . The method of  claim 27 , wherein a wall of said groove is stair-stepped.  
   
   
       30 . The method of  claim 26 , wherein said groove is ‘V’-shaped.  
   
   
       31 . The method of  claim 29 , wherein a wall of said groove is stair-stepped.  
   
   
       32 - 25 . (canceled)