Small thin piece holder using elastic material

Abstract

To provide a small thin piece holder which can reduce damage due to contact with an adhesive and bend or damage generated in detachment, and can stably, detachably hold or carry only one part of a small thin piece, a sheet shaped member having elasticity is provided with a cut into which one part of a small thin piece can be detachably inserted and which can hold it.

1 . A small thin piece holder comprising a sheet shaped member having elasticity which is provided with at least one cut into which one part of a small thin piece can be detachably inserted and held.  
   
   
       2 . A small thin piece holder according to  claim 1 , wherein the sheet shaped member is formed of an elastomer.  
   
   
       3 . A small thin piece holder according to  claim 2 , wherein the elastomer is a thermoplastic elastomer or rubber.  
   
   
       4 . A small thin piece holder according to  claim 1 , wherein the sheet shaped member is formed of hydro-gel.  
   
   
       5 . A small thin piece holder according to  claim 1 , wherein the sheet shaped member has an elasticity of 10 −4  MPa to 2 MPa at room temperature.  
   
   
       6 . A small thin piece holder according to  claim 1 , wherein the cut provided in a direction orthogonal to the top surface of the sheet shaped member.  
   
   
       7 . A small thin piece holder according to  claim 1 , wherein the cut is provided in a direction tilting toward the top surface the sheet shaped member.  
   
   
       8 . A small thin piece holder according to  claim 1 , wherein the sheet shaped member is housed in a container having a lid.  
   
   
       9 . A small thin piece holder according to  claim 1 , wherein the small thin piece is an MEMS structure or a TEM mesh or a microscope cantilever.