High contrast grating light valve

Abstract

A grating light valve is provided with a plurality of spaced reflective ribbons, spatially arranged over a semiconductor substrate, the ribbons and substrate being provided with reflective surfaces. The grating light valve is configured to optimize the conditions for constructive and destructive interference with an incident light source having a given wavelength. In a preferred embodiment, one set of ribbons is moveable with respect to the substrate and the second set of ribbons. The substrate is typically provided with a protective layer, which may be thermally grown silicon dioxide or other dielectric. A conductive trace is provided on the dielectric layer and grounded through the dielectric layer to the substrate, comprising a conductive trace for easy release of charge otherwise trapped in the dielectric layer.

1 . A reflective light processing element, comprising: a substrate; 
 a dielectric layer formed on the substrate;    a conductive trace formed on the dielectric layer, the conductive trace allowing charges    trapped in the dielectric layer to escape; and    a plurality of ribbons formed above the substrate and the conductive trace.    
     
     
         2 . A high contrast grating light valve comprising a silicon substrate; a protective dielectric layer formed on the substrate; 
 a first set of ribbons each with a first average width W a  and a second set of ribbons each with a second average width W b , wherein the ribbons of the first set alternate between the ribbons of the second set and, one of said first and second set of ribbons is configured to move relative to the other to constructively and destructively interfere with an incident light source having a wavelength λ;    wherein said substrate comprises a silicon wafer protected by a dielectric layer; and    a conductive trace formed at least partly on the protective layer and in electrical contact with said substrate, allowing charges trapped in the protective layer to escape.    
     
     
         3 . The grating light valve of  claim 2 , wherein said dielectric layer comprises silicon dioxide.  
     
     
         4 . The grating light valve of  claim 2 , wherein said conductive trace is comprised of aluminum.  
     
     
         5 . The grating light valve of  claim 2 , wherein width W a  is >W b    
     
     
         6 . The grating light valve of  claim 2 , wherein the top surfaces of the ribbons in said first set and the top surfaces of the ribbons in said second set and regions of the surface between the ribbons of the first set and second set have reflective surfaces.  
     
     
         7 . The grating light valve of  claim 5 , wherein the reflective surfaces comprise aluminum.