Dynamic bearing manufacturing method

Abstract

A method of manufacturing a dynamic bearing comprises providing a bearing having a through hole. A photoresist is coated on an inner wall of the through hole. An ultraviolet lamp capable of inserting into the through hole is provided. A mask having patterns of pressure-generating grooves is attached to the surface of the ultraviolet lamp. The ultraviolet lamp is inserted into the through hole to perform an exposure process with the mask. The exposed portions of photoresist are developed to appear portions of the inner wall underneath. The appeared portions of the inner wall are etched to form grooves on the bearing, and finally, the photoresist remaining on the inner wall of the through hole is stripped.

1 . A method of manufacturing a dynamic bearing, comprising the steps of: 
 providing a bearing having a through hole;    coating a photoresist on an inner wall of the through hole of the bearing;    inserting an ultraviolet lamp having at least one pattern of groove into the through hole and performing an exposure process;    removing the photoresist to expose portions of the inner wall by a developer; and    etching the exposed portions of the inner wall to form at least one groove by an etchant.    
   
   
       2 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the pattern of groove is formed on a mask attached to the surface of the ultraviolet lamp.  
   
   
       3 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the mask further comprises a pattern of oil reservoir.  
   
   
       4 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the shape of the pattern of groove comprises V-shape, substantially-modified-X-shape, fish bone shape, twill or straight stripe shape.  
   
   
       5 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the bearing is baked after the inner wall is coated with the photoresist.  
   
   
       6 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the bearing and the through hole thereof are formed by cutting, turning or powder sintering.  
   
   
       7 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the photoresist is coated on the inner wall by spray coating, dipping, spin coating or centrifugal coating.  
   
   
       8 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the ultraviolet lamp comprises a cold cathode fluorescent lamp or optical fiber illuminant.  
   
   
       9 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the inner wall of the bearing is cleaned by water after the developing step.  
   
   
       10 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the inner wall of the bearing is cleaned by water after the etching step.  
   
   
       11 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein a stripping solution is used to remove the residual photoresist on the inner wall after the etching step.  
   
   
       12 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the bearing comprises copper or metal.  
   
   
       13 . The method of manufacturing a dynamic bearing as claimed in  claim 1 , wherein the photoresist is a positive photoresist.  
   
   
       14 . The method of manufacturing a dynamic bearing as claimed in  claim 13 , wherein the photoresist comprises polyimide, diazonium salt, or sulfonamide chlorine.  
   
   
       15 . The method of manufacturing a dynamic bearing as claimed in  claim 13 , wherein the pattern of groove is transparent, while the other portion of the mask is opaque.  
   
   
       16 . The method of manufacturing a dynamic bearing as claimed in  claim 15 , wherein the ultraviolet lamp emits ultraviolet light having the wavelength ranging from 350 nm to 450 nm.  
   
   
       17 . The method of manufacturing a dynamic bearing as claimed in  claim 16 , wherein the developer comprises sodium hydroxide solution.  
   
   
       18 . The method of manufacturing a dynamic bearing as claimed in  claim 17 , wherein the etchant comprises ferric chloride, cupric chloride or ammonium sulfide solution.  
   
   
       19 . The method of manufacturing a dynamic bearing as claimed in  claim 18 , wherein after the etching step, the residual photoresist on the inner wall is removed by alcohol.  
   
   
       20 . A method of manufacturing a dynamic bearing, comprising the steps of: 
 providing a bearing having a through hole, and an ultraviolet lamp;    applying a photoresist on an inner wall of the through hole of the bearing;    attaching a mask having patterns of at least one pressure-generating groove and an oil reservoir on the surface of the ultraviolet lamp;    inserting the ultraviolet lamp into the through hole to perform an exposure process;    removing the photoresist to expose portions of the inner wall;    etching the exposed portions of the inner wall to form grooves and oil reservoir thereon; and    stripping the photoresist remaining on the inner wall.