Apparatus for manipulation of an optical element

Abstract

The invention relates to an apparatus for manipulation of an optical element ( 7 ) in up to six degrees of freedom with respect to a structure ( 8 ) via at least three actuator devices ( 9 ). The actuator devices ( 9 ) each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points ( 11 ) of the actuator devices ( 9 ) acting directly on the optical element ( 7 ).

1 - 44 . (canceled)  
   
   
       45 . An apparatus for manipulation of an optical element in up to six degrees of freedom with respect to a structure via at least three actuator devices, wherein said actuator devices each comprise at least two force-controlled actuators, which each produce an effective force in one degree of freedom, with linking points of said actuator devices acting directly on the optical element.  
   
   
       46 . The apparatus as claimed in  claim 45 , wherein three actuator devices are provided.  
   
   
       47 . The apparatus as claimed in  claim 46 , wherein said actuator devices each comprise at least two force-controlled actuators which each produce an effective force along one degree of freedom.  
   
   
       48 . The apparatus as claimed in  claim 45 , wherein said at least two force-controlled actuators of said actuator device in each case are arranged in a plane at an angle of approximately 60° to approximately 120°, preferably 90°, with respect to one another.  
   
   
       49 . The apparatus as claimed in  claim 45 , wherein said actuator devices each comprise a gravity compensation device as an opposing force element in order to compensate for the gravity force of the optical element.  
   
   
       50 . The apparatus as claimed in  claim 45 , wherein the three planes which are covered by said respective force-controlled actuators of an actuator device are parallel to the gravity force, and form a triangle in the projection parallel to the gravity force.  
   
   
       51 . The apparatus as claimed in  claim 45 , wherein said actuator devices are arranged essentially uniformly at intervals, preferably at three intervals of 120° around the optical element.  
   
   
       52 . The apparatus as claimed in  claim 45 , wherein the plane which is covered by said linking points of said actuator devices on the optical element lies at least approximately on a neutral plane of the optical element.  
   
   
       53 . The apparatus as claimed in  claim 45 , wherein the effective forces of said at least two force-controlled actuators of said actuator devices in each case pass through a common point, preferably on the optical element.  
   
   
       54 . The apparatus as claimed in  claim 49 , wherein the effective force of said gravity compensation device is essentially parallel to the gravity force, and preferably passes through a common point of the effective forces of said two force-controlled actuators of an actuator device in each case.  
   
   
       55 . The apparatus as claimed in  claim 49 , wherein the effective forces of said at least two force-controlled actuators of said actuator device in each case, and/or said gravity compensation device are/is mechanically decoupled from the optical element, preferably via magnetic forces.  
   
   
       56 . The apparatus as claimed in  claim 45 , wherein sensors are provided for determination of a position of the optical element.  
   
   
       57 . The apparatus as claimed in  claim 45 , wherein said actuator devices can be replaced, for manufacturing purposes, by a passive substitute module, with the force directions and action points in the manufacturing phase and during subsequent use matching.  
   
   
       58 . The apparatus as claimed in  claim 45 , wherein said force-controlled actuators are in the form of electromagnetic or magnetostatic, in particular Lorentz actuators.  
   
   
       59 . The apparatus as claimed in  claim 45 , wherein the optical element is in the form of a mirror.  
   
   
       60 . The apparatus as claimed in  claim 45 , wherein the structure is a housing or a sensor frame of a projection objective, in particular of a projection illumination system for microlithography for producing semiconductor components in the EUV range.  
   
   
       61 . The apparatus for manipulation of an optical element in six degrees of freedom with respect to a structure via at least three actuator devices, wherein linking points of said actuator devices act directly on the optical element, and the plane which is covered by the linking points of said actuator devices on the optical element lying at least approximately on a neutral plane of the optical element.  
   
   
       62 . The apparatus as claimed in  claim 61 , wherein three actuator devices are provided.  
   
   
       63 . The apparatus as claimed in  claim 61 , wherein said actuator devices each comprise at least two force-controlled actuators which each produce an effective force along one degree of freedom.  
   
   
       64 . The apparatus as claimed in  claim 61 , wherein said at least two force-controlled actuators of said actuator device in each case are arranged in a plane at an angle of approximately 60° to approximately 120°, preferably 90°, with respect to one another.  
   
   
       65 . The apparatus as claimed in  claim 61 , wherein said actuator devices each comprise a gravity compensation device as an opposing force element in order to compensate for the gravity force of the optical element.  
   
   
       66 . The apparatus as claimed in  claim 61 , wherein said actuator devices are arranged essentially uniformly at intervals, preferably at three intervals of 120° around the optical element.  
   
   
       67 . The apparatus as claimed in  claim 65 , wherein the effective force of said gravity compensation device is essentially parallel to the gravity force, and preferably passes through a common point of the effective forces of said two force-controlled actuators of an actuator device in each case.  
   
   
       68 . The apparatus as claimed in  claim 65 , wherein the effective forces of said at least two force-controlled actuators of said actuator device in each case, and/or said gravity compensation device are/is mechanically decoupled from the optical element, preferably via magnetic forces.  
   
   
       69 . The apparatus as claimed in  claim 61 , wherein sensors are provided for determination of a position of the optical element.  
   
   
       70 . The apparatus as claimed in  claim 61 , wherein said actuator devices can be replaced, for manufacturing purposes, by a passive substitute module, with the force directions and action points in the manufacturing phase and during subsequent use matching.  
   
   
       71 . The apparatus as claimed in  claim 61 , wherein the optical element is in the form of a mirror.  
   
   
       72 . The apparatus as claimed in  claim 61 , wherein the structure is a housing or a sensor frame of a projection objective, in particular of a projection illumination system for microlithography for producing semiconductor components in the EUV range.  
   
   
       73 . An apparatus for manipulation of an optical assembly in up to six degrees of freedom with respect to a structure via at least three actuator devices, wherein said actuator devices each comprise at least two force-controlled actuators, which each produce an effective force in one degree of freedom.  
   
   
       74 . The apparatus as claimed in  claim 73 , wherein three actuator devices are provided.  
   
   
       75 . The apparatus as claimed in  claim 73 , wherein said at least two force-controlled actuators of said actuator device in each case are arranged in a plane at an angle of approximately 60° to approximately 120°, preferably 90°, with respect to one another.  
   
   
       76 . The apparatus as claimed in  claim 73 , wherein said actuator devices each comprise a gravity compensation device as an opposing force element in order to compensate for the gravity force of the optical assembly.  
   
   
       77 . The apparatus as claimed in  claim 73 , wherein the three planes which are covered by said respective force-controlled actuators of an actuator device are parallel to the gravity force, and form a triangle in the projection parallel to the gravity force.  
   
   
       78 . The apparatus as claimed in  claim 73 , wherein said actuator devices are arranged essentially uniformly at intervals, preferably at three intervals of 120°, around the optical assembly.  
   
   
       79 . The apparatus as claimed in  claim 73 , wherein the effective forces of said at least two force-controlled actuators of said actuator devices in each case pass through a common point, preferably on the optical assembly.  
   
   
       80 . The apparatus as claimed in  claim 76 , wherein the effective force of said gravity compensation device is essentially parallel to the gravity force, and preferably passes through a common point of the effective forces of said two force-controlled actuators of an actuator device in each case.  
   
   
       81 . The apparatus as claimed in  claim 76 , wherein the effective forces of said at least two force-controlled actuators of said actuator device in each case, and/or said gravity compensation device are/is mechanically decoupled from the optical assembly, preferably via magnetic forces.  
   
   
       82 . The apparatus as claimed in  claim 73 , wherein sensors are provided for determination of a position of the optical assembly.  
   
   
       83 . The apparatus as claimed in  claim 73 , wherein said actuator devices can be replaced, for manufacturing purposes, by a passive substitute module, with the gravity force directions and action points in the manufacturing phase and during subsequent use matching.  
   
   
       84 . The apparatus as claimed in  claim 73 , wherein said force-controlled actuators are in the form of electromagnetic or magnetostatic, in particular Lorentz actuators.  
   
   
       85 . The apparatus as claimed in  claim 73 , wherein the structure is a housing or a sensor frame of a projection objective, in particular of a projection illumination system for microlithography for producing semiconductor components in the EUV range.  
   
   
       86 . The apparatus as claimed in  claim 73 , wherein the optical assembly has at least one optical element and at least one socket element.  
   
   
       87 . A projection objective, in particular a projection illumination system for microlithography for production of semiconductor components in the EUV range comprising two or more optical elements which are arranged in a housing, with at least one optical element being mounted such that it can be manipulated with respect to the housing by means of an apparatus as claimed in one of claims  45 ,  61  or  73 .  
   
   
       88 . An actuator device for directly linking an optical element or an optical assembly to a structure comprising at least two force-controlled actuators, which each produce an effective force along one degree of freedom and are arranged in a plane at an angle of approximately 60° to approximately 120°, preferably 90°, with respect to one another.  
   
   
       89 . The actuator device as claimed in  claim 88 , wherein the effective forces of said at least two force-controlled actuators in each case pass through a common point, preferably on the optical element or on the optical assembly.  
   
   
       90 . The actuator device as claimed in  claim 88 , distinguished by a gravity compensation device as an opposing force element in order to compensate for the gravity force of the optical element or of the optical assembly, whose effective force is essentially parallel to the gravity force, and preferably passes through a common intersection point of the effective forces of said two force-controlled actuators.  
   
   
       91 . The actuator device as claimed in  claim 88 , wherein a linking point on the optical element lies at least approximately on a neutral plane of the optical element.  
   
   
       92 . A force controlled-actuator producing an effective force in one degree of freedom, said actuator comprising a first element and a second element which are movable relative to each other, said first element and said second element being mechanically decoupled such that only gas or vacuum being between said first and said second elements.  
   
   
       93 . A first force-controlled actuator according to  claim 92 , wherein one element is mechanically coupled via a coupling element to an element of a second force-controlled actuator of the same type, both said actuators forming an actuator device.  
   
   
       94 . The actuator device of  claim 93 , wherein said coupling element is movable into at least one degree of freedom, if at least one force-controlled actuator is actuated.  
   
   
       95 . The actuator device of  claim 94 , wherein said coupling element is movable into two degrees of freedom, if two force-controlled actuators are actuated.  
   
   
       96 . The actuator device according to  claim 88  with a force-controlled actuator according to  claim 92 .  
   
   
       97 . The apparatus according to one of the claims  45 ,  61  or  73 , with a force-controlled actuator according to  claim 92 .  
   
   
       98 . The projection objective of  claim 87  with a force-controlled actuator according to  claim 92 .  
   
   
       99 . Application of a force-controlled actuator according to  claim 92  in an apparatus according to claims  45 ,  61  or  73  or a projection objective of  claim 87.