Method of growing a thin film onto a substrate

Abstract

A method of growing a thin film onto a substrate placed in a reaction chamber according to the ALD method by subjecting the substrate to alternate and successive surface reactions. The method includes providing a first reactant source and providing an inactive gas source. A first reactant is fed from the first reactant source in the form of repeated alternating pulses to a reaction chamber via a first conduit. The first reactant is allowed to react with the surface of the substrate in the reaction chamber. Inactive gas is fed from the inactive gas source into the first conduit via a second conduit that is connected to the first conduit at a first connection point so as to create a gas phase barrier between the repeated alternating pulses of the first reactant entering the reaction chamber. The inactive gas is withdrawn from said first conduit via a third conduit connected to the first conduit at a second connection point.

1 - 33 . (canceled)  
   
   
       34 . An apparatus for growing thin films onto a surface of a substrate by exposing the substrate to alternatively repeated surface reactions of vapor-phase reactants, the method apparatus comprising: 
 a first reactant source;    an inactive gas source;    a reaction chamber that provides a space for a first reactant from the first reactant source to react with the surface of the substrate;    a first conduit that connects the first reactant source to the reaction chamber;    a second conduit that connects the first conduit to the inactive gas source at a first connection point;    a third conduit that connects the first conduit to an outlet at a second connection point;    a hot zone in which the reaction chamber and the first conduit are positioned; and    a control valve for controlling the flow of the first reactant into the first conduit, the control valve being positioned outside the hot zone.    
   
   
       35 . The apparatus of  claim 34 , wherein the second connection point is located between the first connection point and the first reactant source.  
   
   
       36 . The apparatus according to  claim 34 , wherein the first reactant source is maintained at least at a vaporizing temperature of the first reactant.  
   
   
       37 . The apparatus of  claim 34 , wherein the first reactant source comprises solid reactant from solid particles.  
   
   
       38 . The apparatus of  claim 34 , wherein the first reaction source comprises liquid reactant from a suspended liquid.  
   
   
       39 . The apparatus of  claim 34 , further comprising a purifier located along the first conduit between the first reaction source and the reaction chamber.  
   
   
       40 . The apparatus according to any of claims  39 , wherein the purifier is a filter comprising at least one of a ceramic molecular sieve and an electrostatic filter capable of separating one of at least dispersed liquid, solid droplets, particles and molecules of a minimum molecular size from the reactant gas flow.  
   
   
       41 . The apparatus according to any of claims  39 , wherein the purifier is an active purifier comprising functional groups capable of reacting with components present in the reactant gas flow.  
   
   
       42 . The apparatus of  claim 39 , wherein the purifier is located between the first connection point and the first reaction source.  
   
   
       43 . The apparatus of  claim 42 , wherein the second connection point is located between the first connection point and the first reactant source.  
   
   
       44 . The apparatus of  claim 43 , wherein the purifier is located between the second connection point and the first reactant source.  
   
   
       45 . The apparatus of  claim 34 , wherein the third conduit is maintained at a temperature equal to or higher than a condensation temperature of the first reactant.  
   
   
       46 . The apparatus according to  claim 34 , wherein the second conduit is maintained at a temperature no greater than a reaction temperature of the reaction chamber.  
   
   
       47 . The apparatus according to  claim 34 , wherein the third conduit is an open gas flow channel.  
   
   
       48 . The apparatus according to  claim 34 , wherein the third conduit does not include valves.  
   
   
       49 . The apparatus according to  claim 34 , wherein the first conduit does not include valves.  
   
   
       50 . The apparatus according to  claim 34 , further comprising the outlet is also connected to the reaction chamber.  
   
   
       51 . The apparatus according to  claim 34 , wherein the reaction chamber is connected to a separate outlet than the third conduit.  
   
   
       52 . The apparatus according to  claim 34 , further comprising a second inactive gas source and a fourth conduit that connects an inlet of the first reactant source to the second inactive gas source so as to provide carrier gas for the first reactant.  
   
   
       53 . The apparatus according to  claim 34 , further comprising a fourth conduit that connects the inactive gas source to an inlet of the first reactant source so as to provide a carrier gas for the first reactant.  
   
   
       54 . The apparatus according to  claim 34 , further comprising a condensation vessel that is connected to the third conduit.  
   
   
       55 . The apparatus according to  claim 34 , further comprising a second inactive gas source that is connected to the third conduit via a fourth conduit.  
   
   
       56 . The apparatus according to  claim 34 , further comprising a fourth conduit that connects the inactive gas source to the third conduit.  
   
   
       57 . The apparatus according to  claim 56 , wherein the fourth conduit is connected to the third conduit upstream of a flow restrictor.  
   
   
       58 . The apparatus according to  claim 34 , further comprising a 
 a second reactant source;    a fourth conduit that connects the second reactant source to the reaction chamber;    a fifth conduit that connects the inactive gas source to the fourth conduit at a third connection point; and a    a sixth conduit that is connected to the fourth conduit and the outlet.    
   
   
       59 . The apparatus according to  claim 34 , wherein the hot zone is maintained at a temperature equal to or higher than a condensation temperature of the first reactant.  
   
   
       60 . The apparatus according to  claim 59 , wherein the hot zone is maintained at a temperature no greater than a reaction temperature of the reaction chamber.  
   
   
       61 . The apparatus according to  claim 60 , wherein control valve is positioned in the second conduit.