Arrangement and method to sense flow using mechanical stress microsensors

Abstract

A fluid flow control assembly includes at least one flow control device movably attached to a structure through which fluid flows, the flow control device operable to at least partially regulate fluid flow through the structure. The assembly also includes an actuator, at least one rotatable mechanical element and a sensor module. The actuator is configured to control a position of the at least one flow control device. The rotatable mechanical element is operably coupled between the actuator and the at least one flow control device. The sensor module is coupled to a first of the at least one rotatable mechanical element, and includes a sensor device operable to determine a fluid-flow induced force on the first rotatable mechanical element.

1 . A fluid flow control assembly comprising: 
 at least one flow control device movably secured proximate to a structure through which fluid flows, the at least one flow control device configured to at least partially regulate fluid flow through the structure;    an actuator configured to control a position of the at least one flow control device;    at least one rotatable mechanical element operably coupled between the actuator and the at least one flow control device; and    a sensor module coupled to a first of the at least one rotatable mechanical element, the sensor module including a sensor device operable to determine a fluid-flow induced force on the first rotatable mechanical element.    
     
     
         2 . The fluid flow control assembly of  claim 1 , wherein the sensor module further includes a first wireless communication circuit operable to communicate fluid-flow induced force information to a second wireless communication circuit.  
     
     
         3 . The fluid flow control assembly of  claim 2 , wherein the first wireless communication circuit includes an RF communication device.  
     
     
         4 . The fluid flow control assembly of  claim 1 , wherein the sensor device comprises a strain gauge.  
     
     
         5 . The fluid flow control assembly of  claim 4 , wherein the sensor device comprises a microelectromechanical systems strain gauge.  
     
     
         6 . The fluid flow control assembly of  claim 1 , wherein the sensor device comprises a microelectromechanical systems sensor.  
     
     
         7 . The fluid flow control assembly of  claim 2 , wherein the fluid-flow induced force information comprises fluid flow information derived from force measurements.  
     
     
         8 . The fluid flow control assembly of  claim 7 , wherein the actuator is configured to control a position of a liquid flow valve based at least in part on the fluid flow information.  
     
     
         9 . The fluid flow control assembly of  claim 2 , wherein the actuator is configured to control a position of the at least one flow control device based at least in part on the fluid-flow induced force information.  
     
     
         10 . The fluid flow control assembly of  claim 1 , wherein the sensor module further comprises a processing circuit operable to generate fluid flow information based on the fluid flow induced force information.  
     
     
         11 . The fluid flow control assembly of  claim 1 , wherein flow control device comprises a valve configured to control the flow of liquids.  
     
     
         12 . The fluid flow control assembly of  claim 1 , wherein the flow control device comprises a damper configured to control the flow of gasses.  
     
     
         13 . A sensor module, comprising: 
 a MEMs sensor device operable to determine a fluid flow induced mechanical force on a first flow control device connective element; and    a processing circuit operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force, the processing circuit operable to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element.    
     
     
         14 . The sensor module of  claim 13 , wherein the processing circuit is operable to generate the fluid flow measurement value based on the fluid flow induced mechanical force information and the position information representative of the position of the flow control device, the flow control device being mechanically coupled to the flow control connective element.  
     
     
         15 . The sensor module of  claim 13 , further comprising a first wireless communication circuit operable to communicate information representative of the fluid flow measurement to a second wireless communication circuit.  
     
     
         16 . The sensor module of  claim 15 , wherein the first wireless communication circuit includes an RF communication device.  
     
     
         17 . The sensor module of  claim 13 , wherein the sensor device comprises a strain gauge.  
     
     
         18 . The sensor module of  claim 13 , wherein flow control device comprises a valve configured to control the flow of liquids  
     
     
         19 . The sensor module of  claim 13 , wherein the flow control device comprises a damper configured to control the flow of gasses.  
     
     
         20 . A sensor module, comprising: 
 a MEMs sensor device operable to determine a liquid flow induced mechanical force on a first valve control element;    a processing circuit operably coupled to receive liquid flow induced mechanical force information based on the determined liquid flow induced mechanical force, the processing circuit operable to generate a liquid flow measurement value based on the liquid flow induced mechanical force information; and    a first wireless communication circuit operable to communicate information representative of the liquid flow measurement to a second wireless communication circuit.