Flexible materials processing rotation tool

Abstract

A flexible material processing rotation tool that executes processing against a target material composed of flexible material, and which is characterized by forming or more cutting blade protrusions on the surface of the substrate so that they project upward, formation of an inclined surface on the surface of cutting blade protrusion and formation of cutting blade ridge at the section that projects most upward from among the ridge areas of inclined surface, and by arrangement so that a portion of the inclined surfaces of cutting blade protrusions facing at least in one direction of the circumferential direction of the rotation of the substrate, and arrangement of at least a portion of the remaining inclined surfaces of cutting blade protrusions in at least the other direction of the circumferential direction of the rotation of the substrate.

1 . A flexible material processing rotation tool for processing a target material which is composed of flexible material and is moving, comprising: 
 a substrate having a surface:    two or more cutting blade protrusions protruding upwards formed on the surface of the substrate;    the upper surfaces of the cutting blade protrusions are inclined surfaces inclined in relation to a parallel flat surface on a bottom surface of said substrate; and    of a cutting blade ridge formed on at least the part of the inclined surface protruding furthest upward;    wherein the inclined surfaces of a portion of the cutting blade protrusions are arranged to face at least one circumferential direction for rotation of the substrate, and at least a portion of the inclined surfaces of the remaining cutting blade protrusions are arranged to face at least the other circumferential direction.    
   
   
       2 . The flexible materials processing rotation tool according to  claim 1  further comprising an angle θ formed between the inclined surfaces and the parallel flat surface on the bottom surface being set within a range of 5 degrees≦θ<40 degrees.  
   
   
       3 . The flexible materials processing rotation tool according to  claim 1  wherein the cutting blade protrusions are arranged on a surface of pedestals protruding upward from the substrate.  
   
   
       4 . The flexible materials processing rotation tool according to  claim 1  wherein the cutting blade protrusions are formed of abrasion resistant material.  
   
   
       5 . The flexible materials processing rotation tool according to  claim 1  wherein the surfaces of the cutting blade protrusions are coated with a diamond film.  
   
   
       6 . The flexible materials processing rotation tool according to  claim 1  further comprising a height of the areas formed by the cutting blade ridges of the cutting blade protrusions is within a range of 0.03 mm to 0.15 mm.  
   
   
       7 . The flexible materials processing rotation tool according to  claim 1  further comprising a total length for summed lengths of all cutting blade ridges formed on the surfaces of the substrate are within a range of 7.5 mm to 80 mm.  
   
   
       8 . The flexible materials processing rotation tool according to  claim 1  further comprising a pad conditioner for conditioning a CMP polishing pad.