Mask-making member and its production method, mask and its making method, exposure process, and fabrication method of semiconductor device

Abstract

A mask blank has a plurality of pattern formation regions in which mask circuit patterns are to be formed, and a supporting region in which any mask circuit pattern is not to be formed. The supporting region is provided for holding the plurality of pattern formation regions while separating the plurality of pattern formation regions from each other. The supporting region has first and second alignment marks. Exposure of a mask made from the mask blank for forming mask circuit patterns thereon is performed on the basis of the first alignment marks, and exposure of a substrate for forming circuit patterns thereon is performed on the basis of the second alignment marks. With this configuration, a mask used for charged particle beam reduction-and-division transfer exposure can be highly accurately produced at a low cost, and exposure of a substrate can be highly accurately performed by using the mask.

1 . A method of making a mask, which mask has a plurality of pattern formation regions in which mask circuit patterns are formed, and a supporting region in which any mask circuit pattern is not formed, said supporting region being provided for holding said plurality of pattern formation regions while separating said plurality of pattern formation regions from each other, wherein said supporting region has first alignment marks used at a time of alignment with said mask for forming said mask circuit patterns thereon, second alignment marks used at a time of alignment with a substrate to be exposed for forming circuit patterns thereon, said method comprising the step of: 
 forming all of said first alignment marks and said second alignment marks on said mask at one time; 
 wherein the alignment with said mask for forming said first alignment marks and said second alignment marks thereon at one time is performed by using a contact type full exposure system.  
   
     
     
         2 . A method of making a mask, which mask has a plurality of pattern formation regions in which mask circuit patterns are formed, and a supporting region in which any mask circuit pattern is not formed, said supporting region being provided for holding said plurality of pattern formation regions while separating said plurality of pattern formation regions from each other, wherein said supporting region has first alignment marks used at a time of alignment with said mask for forming said mask circuit patterns thereon, second alignment marks used at a time of alignment with a substrate to be exposed for forming circuit patterns thereon, said method comprising the step of: 
 forming all of said first alignment marks and said second alignment marks on said mask at one time; 
 wherein the alignment with said mask for forming said first alignment marks and said second alignment marks thereon at one time is performed by using a mirror-projection type full exposure system.