Linearly translating agitators for processing microfeature workpieces, and associated methods

Abstract

Systems and methods for processing microfeature workpieces with agitators are disclosed. A system in accordance with one embodiment includes a vessel configured to receive a processing fluid at a process location, a fluid inlet positioned to direct the processing fluid into the vessel, a weir positioned above the process location and outwardly from the fluid inlet to receive the processing fluid moving radially outwardly from the inlet, and a workpiece support positioned to carry a workpiece at the process location. An agitator has an elongated agitator element positioned proximate to the process location, a first support proximate to a first end of the agitator element, and a second support proximate to an opposite end of the agitator element. A motor is coupled to the first support and not the second support to drive the agitator along a linear path relative to the process location. A linear guide is engaged with the second support to guide the motion of the agitator.

1 . A system for processing microfeature workpieces, comprising: 
 a vessel configured to receive a processing fluid at a process location;    a fluid inlet positioned to direct the processing fluid into the vessel;    a weir positioned above the process location and outwardly from the fluid inlet to receive the processing fluid moving radially outwardly from the fluid inlet;    a workpiece support positioned to carry a microfeature workpiece at the process location;    an agitator having an elongated agitator element proximate to the process location;    a first support carrying the agitator proximate to a first end of the agitator element, and a second support carrying the agitator proximate to a second end of the agitator element opposite the first end;    a motor operatively coupled to the first support and not the second support to drive the agitator along a linear path relative to the process location;    and    a linear guide engaged with the second support.    
   
   
       2 . The system of  claim 1  wherein the agitator element is one of a plurality of elongated, spaced-apart agitator elements, with fluid-transmissible openings between neighboring agitator elements.  
   
   
       3 . The system of  claim 1  wherein the linear guide is positioned to (a) restrict movement of the agitator toward and away from the process location along a first axis, (b) allow linear translation of the agitator along the linear path aligned with a second axis generally perpendicular to the first axis, and (c) allow for movement of the agitator along a third axis generally perpendicular to the first and second axes to at least reduce the tendency for the agitator to bind with the linear guide.  
   
   
       4 . The system of  claim 3  wherein the linear guide includes a generally U-shaped channel having an upwardly facing opening, and wherein the channel carries rollers connected to the second support.  
   
   
       5 . The system of  claim 4  wherein at least one of the rollers is in contact with a first sidewall of the channel, and wherein none of the remaining rollers contacts a second sidewall facing toward the first sidewall.  
   
   
       6 . The method of  claim 5  wherein the channel includes lips extending inwardly toward each other from the upper ends of each of the sidewalls to restrict motion of the agitator toward and away from the process location.  
   
   
       7 . The system of  claim 4  wherein at least one of the rollers has a fixed position relative to the agitator and wherein another of the rollers has an adjustable position relative to the agitator.  
   
   
       8 . The system of  claim 1 , further comprising first and second magnets positioned on opposite sides of the vessel to orient material applied to a microfeature workpiece at the process location.  
   
   
       9 . The system of  claim 1  wherein the first and second supports extend upwardly away from the process location, and wherein the vessel includes first and second splash chambers, each extending upwardly from the process location and positioned around one of the first and second supports to contain fluid splashing.  
   
   
       10 . The system of  claim 1 , further comprising an electrode support positioned below the process location to carry multiple, independently controllable electrodes in fluid communication with the process location.  
   
   
       11 . The system of  claim 1  wherein the agitator element has a generally pointed upper extremity and a generally pointed lower extremity.  
   
   
       12 . The system of  claim 1 , further comprising an electrode positioned apart from the workpiece support and above the process location.  
   
   
       13 . The system of  claim 12  wherein the electrode is one of a plurality of electrodes, the one electrode being coupled to a potential at a first polarity, and wherein a subset of the electrodes are positioned in fluid communication with the process location and are coupled to a potential at a second polarity opposite the first, and wherein the workpiece support carries a contact coupled to a potential at the first polarity and positioned to contact a microfeature workpiece at the process location.  
   
   
       14 . The system of  claim 1  wherein the weir is a first weir, and wherein the system further comprises a second weir positioned radially outwardly from the first weir, the electrode being positioned between the first weir and the second weir.  
   
   
       15 . A method for processing microfeature workpieces, comprising: 
 directing processing fluid upwardly into a vessel toward a microfeature workpiece positioned at a process location of the vessel;    directing the processing fluid radially outwardly adjacent to the microfeature workpiece and over a weir; and    agitating the processing fluid adjacent to the microfeature workpiece with an agitator having an agitator element by: 
 driving a first support positioned toward a first end of the agitator element; and  
 guiding a second support along a linear guide path, without driving the second support, the second support being positioned toward a second end of the agitator element opposite the first end.  
   
   
   
       16 . The method of  claim 15  wherein guiding the second support includes: 
 at least restricting movement of the agitator toward and away from the process location along a first axis;    allowing linear translation of the agitator along the linear path in a direction aligned with a second axis generally perpendicular to the first axis; and    allowing for movement of the agitator along a third axis generally perpendicular to the first and second axes to at least reduce the tendency for the second support to bind.    
   
   
       17 . The method of  claim 16  wherein allowing linear translation of the agitator along the linear path includes allowing a roller carried by the agitator to roll within a guide channel aligned along the linear path.  
   
   
       18 . The method of  claim 17  wherein the roller is a first roller that rolls along a first sidewall of a U-shaped channel having an upwardly facing opening, and wherein allowing for movement of the agitator along the third axis includes allowing a second roller carried by the agitator to be out of contact with the first sidewall and a second sidewall of the channel facing toward the first sidewall of the channel.  
   
   
       19 . The method of  claim 17  wherein the roller rolls along a first sidewall of a U-shaped channel having an upwardly facing opening and a lip extending at least partially across the opening, and wherein at least restricting movement of the agitator toward and away from the process location includes at least restricting motion of the roller via contact with the lip.  
   
   
       20 . The method of  claim 15  wherein agitating the processing fluid includes agitating the processing fluid with a plurality of elongated, spaced-apart agitator elements having fluid-transmissible openings between neighboring agitator elements.  
   
   
       21 . The method of  claim 15 , further comprising containing processing fluid agitated by the agitator with a first splash chamber extending upwardly away from the process location around the first support, and with a second splash chamber extending upwardly from the process location around the second support.  
   
   
       22 . The method of  claim 15 , further comprising orienting material applied to the workpiece via a magnetic field in the vessel formed between first and second magnets positioned on opposite sides of the vessel.  
   
   
       23 . The method of  claim 15 , further comprising: 
 depositing material on the workpiece from a plurality of anodes positioned in fluid communication with the workpiece; and    attracting at least some of the material that would otherwise deposit on the workpiece to a cathode positioned apart from the workpiece and above the process location.