Multi-output harmonic laser and methods employing same

Abstract

A solid-state laser ( 10 ) has a laser resonator ( 20 ) with output ports ( 22 ) at both ends to provide two separate laser micromachining beams ( 42 ). A set of wavelength converters ( 26 ) can be employed to convert the laser machining beams ( 42 ) to harmonic wavelength outputs, thus reducing the risk of damage to the wavelength converters and enabling higher total average harmonic power to be generated from a single laser. The laser machining beams ( 42 ) can be different to perform different laser operations independently or can be adapted to have substantially identical parameters to permit simultaneous parallel high-quality laser operations on substantially identical workpieces ( 54 ), or the laser machining beams ( 42 ) can be combined to provide a single laser system output ( 42 e ). The two laser machining beams ( 42 ) can be further split or multiplexed to suit particular applications.

1 . A solid-state laser comprising: 
 a solid-state laser medium positioned along an optical path to receive laser pumping light from a laser pumping source, the laser medium adapted to facilitate generation of laser output having a first wavelength;    a Q-switch positioned along the optical path between the first and second output ports to transform the laser output into a pulsed laser output;    first and second output ports positioned along the optical path and on different sides of the laser medium for propagating respective first and second laser machining beams of pulsed laser output; and    first and second wavelength converters positioned along the optical path and respectively on different sides of the laser medium, the first and second wavelength converters being adapted for converting the wavelength of the pulsed laser output to a harmonic of the first wavelength such that the first and second laser machining beams have a harmonic wavelength.    
   
   
       2 . A laser system comprising: 
 a solid-state laser medium positioned along an optical path to receive laser pumping light from a laser pumping source, the laser medium adapted to facilitate generation of laser output having a first wavelength;    a Q-switch positioned along the optical path between the first and second output ports to transform the laser output into pulsed laser output;    first and second output ports positioned along the optical path and on different sides of the laser medium for propagating respective first and second laser machining beams of the pulsed laser output;    a first wavelength converter positioned along the optical path and adapted for converting the wavelength of the first laser machining beam to a harmonic of the first wavelength such that the first laser machining beam has a harmonic wavelength;    first and second energy control devices, positioned along the optical path on different sides of the laser medium, for controlling respective first and second energies of the respective first and second laser machining beams; and    a beam positioning system adapted for directing the first and second laser machining beams along respective first and second beam paths to respective first and second target locations to perform one or more micromachining operations.    
   
   
       3 . A method for generating two laser machining beams, comprising: 
 supplying pumping light to a laser medium positioned along an optical path;    employing a Q-switch to provide a pulsed laser output, the Q-switch being positioned along the optical path between first and second output ports that are respectively positioned along the optical path on opposite sides of the laser medium;    propagating the pulsed laser output through the first and second output ports to provide respective first and second laser machining beams; and    directing the first laser machining beam at a first target location and directing the second laser machining beam at a second target location to perform one or more micromachining operations.    
   
   
       4 . A laser comprising: 
 a solid-state laser medium positioned along an optical path to receive laser pumping light from the laser pumping source, the laser medium adapted to generate laser output having a first wavelength;    first and second wavelength converters positioned along the optical path and respectively on different sides of the laser pumping medium, the first and second wavelength converters adapted for converting the laser output to harmonic laser output having second and/or third wavelengths;    first and second output couplers positioned along the optical path and on different sides of the laser medium; and    a Q-switch adapted to control a repetition rate of the laser output such that the laser is adapted to propagate first and second beams of harmonic laser output at a repetition rate of greater than 5 kHz.