High throughput plasma treatment system

Abstract

System and method for the plasma treatment of parts. The system and method involve energizing horizontal and vertical electrodes within a treatment chamber to generate a plasma used to treat the parts.

1 - 27 . (canceled)  
   
   
       28 . A system for plasma treating a plurality of parts, the system comprising: 
 a treatment chamber;    a first horizontal electrode within said treatment chamber; a second horizontal electrode within said treatment chamber, said second horizontal electrode spaced vertically relative to said first horizontal electrode such that the plurality of parts are between said first and second horizontal electrodes;    at least one vertical electrode electrically coupled to one of said first and second horizontal electrodes at a location adjacent to the plurality of parts; and    a plasma-generating device operable to produce a plasma within said treatment chamber for treating the plurality of parts, said plasma generating device electrically connected to at least one of said first horizontal electrode or said second horizontal electrode.    
   
   
       29 . The system of  claim 28  further comprising: 
 a plurality of part supports on said first second electrode or said second horizontal electrode, said part supports arranged in a multilevel array to support the plurality of parts.    
   
   
       30 . The system of  claim 29  wherein said plurality of part supports further comprises a magazine having a plurality of slots, each of said plurality of slots configured to support at least one of the plurality of parts.  
   
   
       31 . A method for the plasma treatment of a plurality of parts in a system including a treatment chamber, a magazine holding the plurality of parts, and a horizontal electrode and a vertical electrode mounted in the treatment chamber, the method comprising: 
 loading the magazine into the treatment chamber at a position within the treatment chamber adjacent the horizontal and vertical electrodes;    energizing the vertical and horizontal electrodes to generate a plasma within the treatment chamber;    treating the plurality of parts with the plasma; and    unloading the magazine and plasma-treated parts from the treatment chamber.    
   
   
       32 . The method of  claim 31  wherein the magazine is a first magazine holding a first plurality of parts and the system further comprises a second magazine holding a second plurality of parts, and loading the magazine further comprises: 
 positioning the first and second magazines on opposite sides of the vertical electrode.    
   
   
       33 . The method of  claim 32  wherein loading the magazine further comprises: 
 supporting the magazine with the horizontal electrode.    
   
   
       34 . The method of  claim 31  wherein the system includes a reaction chamber capable of being engaged sealingly with a chamber base to define the treatment chamber, and the method further comprises: 
 disengaging the reaction chamber from the chamber base for loading the plurality of parts at the plurality of treatment positions within the treatment chamber;    sealingly engaging the reaction chamber with the chamber base after the plurality of parts are loaded; and    evacuating the treatment chamber after the reaction chamber is engaged with the chamber base and before the plasma is generated.    
   
   
       35 . The method of  claim 34  further comprising: 
 venting the treatment chamber after the plurality of parts are plasma treated; and    disengaging the reaction chamber from the chamber base for unloading the plurality of parts after the treatment chamber is vented.    
   
   
       36 . The method of  claim 34  wherein disengaging the reaction chamber from the chamber base further comprises: 
 lifting the reaction chamber from the chamber base.