Docking station for a factory interface

Abstract

An apparatus for docking a substrate storage pod to a factory interface is provided. In one embodiment, an apparatus for docking a substrate storage pod to a factory interface includes a docking station having a substantially horizontal flange extending from a substantially vertical wall. The wall has an aperture formed therethrough. A stage is movably coupled to the flange and adapted to support the substrate storage pod. An engagement mechanism and docking actuator are coupled to the stage. The engagement mechanism is adapted to secure the substrate storage pod to the stage. The docking actuator is adapted to move substrate storage cassette against the bay. A release mechanism is adapted to decouple at least one of the engagement mechanism from the pod or the stage from the docking actuator, thereby facilitating access to the pod in the event of one or more of the actuators becoming immobilized.

1 . An apparatus for docking a substrate storage pod to a factory interface, comprising: 
 a docking station having a substantially horizontal flange extending from a substantially vertical wall having an aperture formed therethrough;    a stage movably coupled to the flange and adapted to support the substrate storage pod;    an engagement mechanism adapted to secure the substrate storage pod to the stage;    a docking actuator coupled to the stage and adapted to move substrate storage pod against the bay; and    a release mechanism adapted to decouple at least one of the engagement mechanism from the pod or the stage from the docking actuator.    
     
     
         2 . The apparatus of  claim 1 , wherein the release mechanism further comprises at least one quick-disassembly device selected from the group consisting of quick pins, lynch pins, clevis pins, dowel pins, quarter-turn fasteners, quick release fasteners, clamps, latches and locks.  
     
     
         3 . The apparatus of  claim 1 , wherein the release mechanism further comprises at least one quick-disassembly device selected from the group consisting of an electromechanical device or a pneumatic device.  
     
     
         4 . The apparatus of  claim 1  further comprising: 
 a bracket coupled to the stage and having the release mechanism coupled thereto, the release mechanism adapted to secure one end of the docking actuator to the bracket.    
     
     
         5 . The apparatus of  claim 4 , wherein the docking actuator is a ball screw that drives a nut along its length.  
     
     
         6 . The apparatus of  claim 5 , wherein the nut is selectively clamped to the bracket by the release mechanism.  
     
     
         7 . The apparatus of  claim 6 , wherein the release mechanism is a clamp.  
     
     
         8 . The apparatus of  claim 1 , wherein the stage is pivotally coupled to the flange.  
     
     
         9 . An apparatus for docking a substrate storage pod to a factory interface, comprising: 
 a docking station having a substantially horizontal flange extending from a substantially vertical wall having an aperture formed therethrough;    a stage pivotally coupled to the flange and adapted to support the substrate storage pod; and    a docking actuator coupled to the stage and rotate the stage.    
     
     
         10 . The apparatus of  claim 9  further comprising: 
 a release mechanism adapted to decouple the stage from the docking actuator.    
     
     
         11 . A factory interface for a processing system, comprising: 
 a first side having at least a first interface port;    a second side disposed opposite the first side and having a second interface port;    a third side disposed adjacent the second side and defining an acute angle with the second side, the third side having a third interface port;    a first load lock chamber coupled to the first interface port;    a first pod door opener coupled to the second interface port; and    a second pod door opener coupled to the second interface port.    
     
     
         12 . The factory interface of  claim 1  further comprising a robot disposed in a fixed location between the first side and the second side.  
     
     
         13 . The factory interface of  claim 12 , wherein the second side and the third side define an angle between about 30 to about 60 degrees.  
     
     
         14 . The factory interface of  claim 12  further comprising 
 a fourth side disposed adjacent the second side opposite the third side; the fourth side defining an acute angle with the second side and having a fourth interface port;    a third pod door opener coupled to the fourth interface port.