Substrate storage container

Abstract

A substrate storage container is provided which can convey, fix and store substrates safely, with threaded members not being loosened by a load applied to a mounting member of the substrate storage container when the container storing substrates is conveyed or when the container is fixed to a substrate processing apparatus and by a heating process at the time of washing and drying of the container. For fastening the mounting member ( 6 ), such as a side plate for conveyance, a bottom plate for positioning the container with respect to a substrate processing apparatus, etc., to the substrate storage container including a container body ( 1 ) and a lid ( 2 ) by threaded members ( 3 ), a locking means for preventing loosening of the threaded members ( 3 ) is interposed between engagement surfaces of each threaded member ( 3 ) and the mounting member ( 6 ).

1 . A substrate storage container comprising a container body, a lid, a mounting member attached to the container body or the lid, and a threaded member fixing the mounting member to the container body or the lid, the mounting member and the threaded member including respective surfaces cooperating with each other when the mounting member is fixed to the container body or the lid by the threaded member, characterized in that: 
 a locking means for preventing loosening of the threaded member is interposed between said surfaces of the threaded member and the mounting member.    
   
   
       2 . The substrate storage container according to  claim 1 , wherein the locking means includes a projection provided on one of said surfaces of the threaded member and the mounting member and a recess provided on the other one of said surfaces so as to engage with the projection.  
   
   
       3 . The substrate storage container according to  claim 1 , wherein the locking means includes a projection provided on one of said surfaces of the threaded member and the mounting member and a recess provided on the other one of said surfaces, wherein the locking means includes a washer interposed between said surfaces of the mounting member and the threaded member, wherein the washer includes contact surfaces each being in contact with a respective one of said surfaces of the mounting member and the threaded member, and wherein the washer is provided on at least one of the contact surfaces thereof with a protrusion engaging with the recess provided on the other one of said surfaces of the threaded member and the mounting member.  
   
   
       4 . The substrate storage container according to  claim 2 , wherein the recess includes inner side surfaces formed asymmetrically relative to a rotation direction of the threaded member, and wherein one of the inner side surfaces abuts against the projection in the case of the rotation of the threaded member in a loosening direction, to thereby prevent the rotation of the threaded member.  
   
   
       5 . The substrate storage container according to  claim 3 , wherein the recess includes inner side surfaces formed asymmetrically relative to a rotation direction of the threaded member, and wherein one of the inner side surfaces abuts against the protrusion of the washer in the case of the rotation of the threaded member in a loosening direction, to thereby prevent the rotation of the threaded member.  
   
   
       6 . The substrate storage container according to  claim 4 , wherein both of the inner side surfaces of the recess are formed as inclined surfaces, and wherein the inclination of the one inner side surface is greater than that of the other inner side surface.  
   
   
       7 . The substrate storage container according to  claim 5 , wherein both of the inner side surfaces of the recess are formed as inclined surfaces, and wherein the inclination of the one inner side surface is greater than that of the other inner side surface.  
   
   
       8 . The substrate storage container according to  claim 3 , wherein the washer is provided on the other contact surface thereof with a second recess engaging with the projection provided on the one of said surfaces of the threaded member and the mounting member.  
   
   
       9 . The substrate storage container according to  claim 3 , wherein the washer is provided on the other contact surface thereof with a second protrusion engaging with the projection provided on the one of said surfaces of the threaded member and the mounting member.  
   
   
       10 . The substrate storage container according to  claim 5 , wherein the protrusion of the washer is formed to be a semicircular shape in cross section, wherein one of the inner side surfaces of the recess is formed as a circular arc surface having a cross-sectional shape which meshes with the semicircular cross section of the protrusion, and the other of the inner side surfaces is formed as a gently inclined surface.  
   
   
       11 . The substrate storage container according to  claim 6 , wherein the inclination of the one inner side surface is 70° to 90° and the inclination of the other inner side surface is 10° to 30°.  
   
   
       12 . The substrate storage container according to  claim 7 , wherein the inclination of the one inner side surface is 70° to 90° and the inclination of the other inner side surface is 10° to 30°.  
   
   
       13 . The substrate storage container according to  claim 1 , wherein when an initial torque is measured by fastening the threaded member to the container body or the lid with a predetermined torque and measuring a torque at the time of loosening the threaded member and when a torque is measured at the time of loosening the threaded member after performing 50 times a heat cycle constituted of: maintaining the substrate storage container at a normal temperature of 20° C. for 20 minutes; increasing the temperature to 100° C. in 40 minutes; maintaining the temperature at 100° C. for 30 minutes; and gradually reducing the temperature to the normal temperature in 50 minutes, a ratio of the difference between the initial torque and the torque after the heat cycles to the initial torque is within ±20% of the initial torque.