Flexible scan field

Abstract

An energy beam machining system includes an emitter for emitting an energy beam and beam adjusting optics, such as a zoom telescope, for adjusting the pupil size of the system to multiple values. The adjusting of the pupil size can be carried out automatically, semi-automatically, or manually. In manual modes, instructions can be presented to the operator (e.g., via a monitor or pre-programmed audio instruction) indicating how to adjust pupil size. A focus lens focuses the adjusted beam directed along each path at a different focal point within a scan field encompassed in the field of view of the focus lens. Beam directing optics are configured to enable multiple scan fields within the field of view of the focus lens.

1 . A laser material processing system for link blasting in a memory array comprising: 
 a laser emitter configured to emit a laser beam;    a zoom telescope configured to adjust the emitted laser beam by adjusting the beam expansion ratio;    beam directing optics configured to direct the adjusted beam within a plurality of scan fields to one or more target links of a memory array;    a lens having a field of view encompassing the plurality of scan fields configured to focus the directed laser beam onto the one or more target links of the memory array;    a control processor configured to receive input corresponding to a packing density of links in a memory array and to issue at least one optimized signal based on the packing density, the at least one optimized signal corresponding to a scan field size and a selected spot size formed without degradation over the scan field; and    a motion system configured to move the memory array relative to the scan field and to position at least one link within the scan field for blasting;    wherein each scan field has a field size and an associated minimum spot size that is formed without degradation over each respective scan field, the minimum spot size increasing with each respective larger field size, and wherein degraded spots are formed beyond the respective scan field within the field of view of the lens, and wherein a zoom telescope setting corresponds to each minimum spot size.    
   
   
       2 . The laser material processing system according to  claim 1 , wherein the motion system moves the memory array relative to the scan field at a controlled velocity corresponding to the scan field size.  
   
   
       3 . The laser material processing system according to  claim 1 , wherein the emitter is an optic fiber that emits a laser beam.  
   
   
       4 . The laser material processing system according to  claim 3 , wherein the laser beam is generated outside the system.  
   
   
       5 . The laser material processing system according to  claim 1 , wherein the scan field size is determined to optimize the scanning speed of the motion system.  
   
   
       6 . The laser material processing system according to  claim 1 , wherein the scan field size is limited by a positioning accuracy requirement.