Faceted mirror apparatus

Abstract

In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12 ′, which have mirror surfaces 15 and are fitted into reception bores 22, 22 ′ of a support plate 16, the mirror facets 12, 12 ′ are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet 12, 12 ′ fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet 12, 12 ′ in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.

1 - 42 . (canceled)  
     
     
         43 . A facetted mirror apparatus, comprising: a facetted mirror having a plurality of mirror facets which generate a beam of rays, wherein each of the mirror facets has a mirror surface with an optical axis, and the mirror facets are each fitted into reception bores of a support plate so that the optical axes of the mirror surfaces are respectively aligned in order to generate the beam of rays, each of the facets having an outer surface which bears directly on the inner wall of the reception bore to provide a stable alignment of the facet within the reception bore.  
     
     
         44 . The apparatus of  claim 43 , wherein the mirror facets each have a cylindrical mirror facet head with a mirror surface and a cylindrical mirror facet base, and they are fitted into stepped reception bores of the support plate with a step ledge.  
     
     
         45 . The apparatus of  claim 44 , wherein the step ledge of the reception bore is respectively intended as a reprocessing face.  
     
     
         46 . The apparatus of  claim 43 , wherein the mirror facets are reprocessed on their back faces, remote from the mirror surfaces, with which they respectively bear on the step ledge of the reception bore.  
     
     
         47 . The apparatus of  claim 43 , wherein the mirror facets each have a conical mirror facet head, with a mirror surface, and a cylindrical mirror facet base, and they are received in reception bores of the support plate with correspondingly matched conical cylindrical shapes.  
     
     
         48 . The apparatus of  claim 47 , wherein the conical region of the mirror facet head or the conical region of the reception bore is respectively intended as a reprocessing face.  
     
     
         49 . The apparatus of  claim 43 , wherein the mirror facets are made of silicon.  
     
     
         50 . The apparatus of  claim 43 , wherein the mirror facets are made of a stainless steel alloy.  
     
     
         51 . The apparatus of  claim 43 , wherein the mirror facets each have a mirror facet head with a mirror surface, on which a marking is provided for azimuthal orientation.  
     
     
         52 . The apparatus of  claim 43 , wherein a combination of spring elements and fastening elements is provided as fixing means for the mirror facets in the reception bores of the support plate.  
     
     
         53 . The apparatus of  claim 43 , wherein the support plate is made of silicon.  
     
     
         54 . The apparatus of  claim 43 , further, comprising: 
 an illumination instrument optically coupled to the facetted mirror to provide illumination incident upon the facetted mirror, and    a microlithography projection objective optically coupled to the facetted mirror to project an image formed using the beam of rays generated by the facetted mirror.    
     
     
         55 . The apparatus of  claim 54 , wherein the mirror facets of the support body have reprocessing faces for alignment of at least one mirror surface.  
     
     
         56 . The apparatus of  claim 54 , wherein the mirror facets each have a cylindrical mirror facet head, with a mirror surface, and a cylindrical mirror facet base, and they are fitted into stepped reception bores of the support plate with a step ledge.  
     
     
         57 . The apparatus of  claim 56 , wherein the step ledge of the stepped reception bore is respectively intended for alignment of the optical axis.  
     
     
         58 . The apparatus of  claim 56 , wherein the mirror facets are intended for alignment of the optical axis on back faces, remote from the mirror surfaces, with which they respectively bear on the step ledge of the reception bores.  
     
     
         59 . The apparatus of  claim 54 , wherein the mirror facets each have a conical mirror facet head with a mirror surface and a cylindrical mirror facet base, and they are received in reception bores of the support plate with correspondingly matched conical and cylindrical shapes.  
     
     
         60 . The apparatus of  claim 59 , wherein the conical region of the mirror facet head or the conical region of the reception bore is respectively intended for alignment of the optical axis.  
     
     
         61 . The apparatus of  claim 54 , wherein the illumination instrument provides illumination within a wavelength range of the extreme ultraviolet.