Method for inspecting a pattern of paste which a dispenser forms on a substrate

Abstract

There is provided a method for inspecting a pattern of paste which a dispenser forms on a substrate, including putting the substrate on a stage; dispensing the paste on the substrate according to a relative distance between a nozzle and a surface of the substrate which a measuring unit measures in real time; storing data on the relative distance which is obtained from the measuring unit; selecting a point corresponding to data falling outside the predetermined range from among the stored data and designating the selected point as an inspection point; translating the data falling outside the predetermined range into a positional value and moving a dispensing head to a position over the inspection point on the pattern of paste corresponding to the positional value; and inspecting at the inspection point if there exists a defect on a pattern of paste.

1 . A method for inspecting a pattern of paste which a dispenser forms on a substrate, comprising: 
 putting the substrate on a stage;    dispensing the paste on the substrate according to a relative distance between a nozzle and a surface of the substrate which a measuring unit measures in real time;    storing data on the relative distance which is obtained from the measuring unit;    selecting a point corresponding to data falling outside the predetermined range from among the stored data and designating the selected point as an inspection point;    translating the data falling outside the predetermined range into a positional value and moving a dispensing head to a position over the inspection point on the pattern of paste corresponding to the positional value; and    inspecting at the inspection point if there exists a defect on a pattern of paste.    
     
     
         2 . The method according to  claim 1 , wherein the measuring unit is a sensor which measures in real time the relative distance between the nozzle and the surface of the substrate and sends data on the relative distance to a controlling unit while dispensing the paste on the substrate.  
     
     
         3 . The method according to  claim 1 , further comprising measuring a cross-sectional area of the paste at the inspection point to inspect if there exists a defect on the pattern of paste.