Support Guide

Abstract

A support guide ( 11 ) for a transporting a flexible elongate substrate ( 13 ) is described. The support guide ( 11 ) comprises a support surface ( 17 ) and a fluid supply means for supplying a fluid between the support surface and the substrate ( 13 ). The fluid maintains the substrate spaced from the support surface ( 17 ) and the flow of the fluid between the substrate and the support surface causes a net longitudinal force on the substrate.

1 . A support guide ( 11 ) for a transporting a flexible elongate substrate ( 13 ), the support guide comprising a support surface ( 17 ) and a fluid supply means ( 18 ) for supplying a fluid between the support surface and the substrate, wherein the fluid maintains the substrate spaced from the support surface and the flow of the fluid between the substrate and the support surface causes a net longitudinal force on the substrate.  
   
   
       2 . A support guide ( 11 ) for a transporting a flexible elongate substrate ( 13 ), the support guide comprising a support surface ( 17 ) and a fluid supply means ( 18 ) for supplying a fluid between the support surface and the substrate, wherein an envelope of the support surface is substantially cylindrical, wherein a portion of the support surface around which the substrate passes is curved with a first constant radius of curvature (R), and a portion ( 21 , 23 ) of the support surface at which the substrate enters or exits has radius of curvature which increases from the first constant radius of curvature (R) to a second radius of curvature at which the support surface is substantially straight.  
   
   
       3 . The support guide as claimed in  claim 2 , wherein the portions ( 21 , 23 ) of the support surface at which the substrate enters and exits each have the radius of curvature which increases from the first constant radius of curvature to the second radius of curvature.  
   
   
       4 . The support guide as claimed in  claim 3 , wherein the lengths of the portions ( 21 , 23 ) of the support surface of varying curvature at which the substrate enters and exits are different.  
   
   
       5 . The support guide as claimed in  claim 1 , wherein the fluid maintains the substrate spaced from the support surface ( 17 ) and the flow of the fluid between the substrate and the support surface causes a net longitudinal force on the substrate.  
   
   
       6 . The support guide of  claim 5 , further for changing the direction of travel of the substrate, wherein part of the support surface ( 17 ) defines a substantially cylindrical surface around which the substrate travels.  
   
   
       7 . The support guide of  claim 6 , wherein the fluid supply means comprises at least one fluid supply channel ( 31 ) formed in the support surface to be covered by the substrate.  
   
   
       8 . The support guide of  claim 7 , wherein the axis of at least one of the fluid supply channels is at an angle to the normal of the support surface, thereby providing the net longitudinal force on the substrate.  
   
   
       9 . The support guide of  claim 6 , wherein the fluid supply means comprises at least one opening ( 19 ) formed in the support surface to be covered by the substrate, the support surface ( 17 ) defining the wall of a chamber through which fluid is supplied.  
   
   
       10 . The support guide of  claim 9 , wherein the area of the at least one opening ( 19 ) formed in the support surface is at least 75% of the area of the support surface to be covered by the substrate ( 13 ).  
   
   
       11 . The support guide of  claim 9 , wherein the at least one opening ( 19 ) formed in the support surface is arranged to be overlapped by the substrate at its edges.  
   
   
       12 . The support guide of  claim 6 , wherein the support surface ( 17 ) is adapted to provide differential fluid flow between the support surface and the substrate at the substrate entry and exit regions ( 21 , 23 ), thereby providing a net longitudinal force on the substrate.  
   
   
       13 . The support guide of  claim 12 , wherein the support surface is adapted to provide the differential fluid flow by providing differential spacing between the support surface ( 17 ) and the substrate ( 13 ) at the substrate entry and exit regions ( 21 , 23 ).  
   
   
       14 . The support guide of  claim 13 , wherein the support surface is adapted to provide greater spacing between the support surface and the substrate at the substrate exit region ( 23 ) than at the substrate entry region ( 21 ), thereby providing a net longitudinal force on the substrate in the forward direction.  
   
   
       15 . The support guide of  claim 13 , wherein the support surface is adapted to provide greater spacing between the support surface and the substrate at the substrate entry region ( 21 ) than at the substrate exit region ( 23 ), thereby providing the net longitudinal force on the substrate in the backwards direction.  
   
   
       16 . The support guide of  claim 12 , wherein the support entry or exit region that is adapted to provide the greater spacing is longer.  
   
   
       17 . The support guide of  claim 1 , wherein the fluid supply means ( 18 ) is a pressurised gas supply means.  
   
   
       18 . The support guide of  claim 1 , wherein the fluid supply means ( 18 ) is a pressurised liquid supply means.  
   
   
       19 . The support guide of  claim 1 , for transporting a flexible elongate substrate ( 13 ) on which electronic devices are manufactured.  
   
   
       20 . A transporting apparatus ( 1 ) for transporting flexible elongate substrates, the transporting apparatus comprising at least one of the support guides ( 11 ) of  claim 1 .  
   
   
       21 . A manufacturing apparatus for manufacturing electronic devices, the manufacturing apparatus comprising the transporting apparatus ( 1 ) of  claim 20 .  
   
   
       22 . A method for transporting a flexible elongate substrate, the method comprising: 
 passing the substrate ( 13 ) over a support surface ( 17 ); and    supplying a fluid between the support surface ( 17 ) and the substrate ( 13 ), wherein the fluid maintains the substrate ( 13 ) spaced from the support surface ( 17 ) and the flow of the fluid between the substrate and the support surface causes a net longitudinal force on the substrate.    
   
   
       23 . The method of  claim 22 , further for changing the direction of travel of the substrate, wherein the support surface ( 17 ) defines a substantially cylindrical surface around which the substrate travels.  
   
   
       24 . The method of  claim 23 , wherein the fluid is supplied through at least one fluid supply channel ( 31 ) formed in the support surface and covered by the substrate.  
   
   
       25 . The method of  claim 24 , wherein the axis of at least one of the fluid supply channels ( 31 ) is at an angle to the normal of the support surface, thereby providing the net longitudinal force on the substrate.  
   
   
       26 . The method of  claim 23 , wherein the fluid is supplied through at least one opening ( 19 ) formed in the support surface and covered by the substrate, the support surface defining the wall of a chamber through which fluid is supplied.  
   
   
       27 . The method of  claim 23 , further comprising providing differential fluid flow between the support surface and the substrate at substrate entry and exit regions ( 21 , 23 ), thereby providing the net longitudinal force on the substrate.  
   
   
       28 . The method of  claim 22 , wherein the fluid is a pressurised gas.  
   
   
       29 . The method of  claim 22 , wherein the fluid is a pressurised liquid.  
   
   
       30 . The method of  claim 22 , for transporting a flexible elongate substrate on which electronic devices are manufactured.