Fluid distribution system

Abstract

The present invention provides a method and apparatus for bulk fluid distribution. In particular, the invention provides a method and apparatus for distributing fluids in a semiconductor manufacturing plant (e.g. a 300 mm fab). The invention meets the performance and uptime requirements of semiconductor manufacturers including increased capacity and pressure control as compared to known fluid distribution systems, and can satisfy the requirements of “no single point failures” and “no planned downtime.”

1 . A fluid distribution system for supplying fluid to a point of use comprising:
 a fluid source;   a first engine adapted to receive fluid from the fluid source and to distribute fluid to the point of use; and   a second engine identical to the first engine, the second engine being adapted to receive fluid from the fluid source and to distribute fluid to the point of use;   wherein the fluid distribution system does not have any single point failures.   
   
   
       2 . The fluid distribution system of  claim 1  having no planned downtime wherein the system is adapted to distribute fluid to the point of use while maintenance is performed on any component of the system. 
   
   
       3 . The fluid distribution system of  claim 1  further comprising a third engine identical to the first and second engines wherein the third engine is adapted to receive fluid from the fluid source and to distribute fluid to the point of use. 
   
   
       4 . The fluid distribution system of  claim 1  wherein the first and second engines comprise a pump and a pressure vessel. 
   
   
       5 . The fluid distribution system of  claim 4  wherein the pressure vessel comprises a level sensor. 
   
   
       6 . The fluid distribution system of  claim 4  wherein the pressure vessel comprises a load cell. 
   
   
       7 . The fluid distribution system of  claim 1  wherein the first and second engines comprise a positive displacement pump and a pulse dampener. 
   
   
       8 . The fluid distribution system of  claim 1  wherein the first and second engines comprise a centrifugal pump. 
   
   
       9 . The fluid distribution system of  claim 1  wherein the first and second engines comprise a pressure vacuum vessel. 
   
   
       10 . The fluid distribution system of  claim 9  wherein each of the pressure vacuum vessels comprises a sensor. 
   
   
       11 . The fluid distribution system of  claim 9  wherein each of the pressure vacuum vessels comprises a load cell. 
   
   
       12 . The fluid distribution system of  claim 1  wherein the point of use is a semiconductor process tool. 
   
   
       13 . A fluid distribution system comprising:
 a main module;   a day tank module;   a fluid source;   a point of use;   a first engine adapted to receive fluid from each of the main module, the day tank module and the fluid source and adapted to dispense fluid to each of the day tank module, the fluid source and the point of use; and   a second engine adapted to receive fluid from each of the main module, the day tank module and the fluid source and adapted to dispense fluid to each of the day tank module, the fluid source and the point of use;   wherein the fluid distribution system does not have any single point failures.   
   
   
       14 . The fluid distribution system of  claim 13  having no planned downtime wherein the system is adapted to distribute fluid to the point of use while maintenance is performed on any component of the system. 
   
   
       15 . The fluid distribution system of  claim 13  further comprising a third engine adapted to receive fluid from each of the main module, the day tank module and the fluid source and adapted to dispense fluid to each of the day tank module, the fluid source and the point of use. 
   
   
       16 . The fluid distribution system of  claim 13  further comprising a central processing unit having an input-output module connected to each of the first and second engines. 
   
   
       17 . The fluid distribution system of  claim 13  further comprising a plurality of central processing units wherein each central processing unit comprises an input-output module connected to each of the first and second engines. 
   
   
       18 . The fluid distribution system of  claim 13  wherein the first and second engines comprise a pump and a pressure vessel. 
   
   
       19 . The fluid distribution system of  claim 18  wherein the pressure vessel comprises a level sensor. 
   
   
       20 . The fluid distribution system of  claim 18  wherein the pressure vessel comprises a load cell. 
   
   
       21 . The fluid distribution system of  claim 13  wherein the first and second engines comprise a positive displacement pump and a pulse dampener. 
   
   
       22 . The fluid distribution system of  claim 13  wherein the first and second engines comprise a centrifugal pump. 
   
   
       23 . The fluid distribution system of  claim 13  wherein the first and second engines comprise a pressure vacuum vessel. 
   
   
       24 . The fluid distribution system of  claim 23  wherein each of the pressure vacuum vessels comprises a sensor. 
   
   
       25 . The fluid distribution system of  claim 23  wherein each of the pressure vacuum vessels comprises a load cell. 
   
   
       26 . A method of distributing fluid to a point of use comprising:
 distributing fluid to the point of use with a first engine;   filtering fluid in a day tank with a second engine; and   filtering fluid in a supply drum with a third engine;   wherein each of the first, second and third engines is adapted to perform the steps of distributing fluid to the point of use, filtering fluid in the day tank and filtering fluid in the supply drum.   
   
   
       27 . The method of  claim 26  wherein in the event of failure of a component in the first engine, the second engine or the third engine is adapted to distribute the fluid to the point of use. 
   
   
       28 . The method of  claim 26  further comprising the step of performing maintenance on a component of the fluid distribution system without requiring any planned downtime.