Vacuum pump

Abstract

A vacuum pump includes a housing, a rotor located in the housing and having a shaft and pump-active elements supported on the shaft, a stator having pump-active elements and located in a separate housing part of the housing, for driving the pump, bearings for rotatably supporting the rotor shaft, and at least one vacuum chamber located in the housing.

1 . A vacuum pump, comprising a housing; a rotor located in the housing and having a shaft and pump-active elements supported on the shaft; a stator located in the housing and having pump-active elements, the housing having a housing part for holding the pump-active elements of the stator; drive means for driving the pump; bearing means for rotatably supporting the rotor shaft; and at least one vacuum chamber located in the housing part. 
   
   
       2 . A vacuum pump, according to  claim 1 , wherein the housing part contains at least one part of the bearing means and drive means and connectable with the housing. 
   
   
       3 . A vacuum pump according to  claim 1 , comprising at least two pumping stages, and at least one further vacuum chamber located in the housing, and wherein the at least one and the further vacuum chambers are connected with each other and with a respective pumping stage. 
   
   
       4 . A vacuum pump according to  claim 3 , wherein the gas pressure in the at least one and further vacuum chambers is not the same. 
   
   
       5 . A vacuum pump according to  claim 1 , wherein the bearing means comprises a permanent magnet bearing for supporting an end of the rotor shaft. 
   
   
       6 . A vacuum pump according to  claim 3 , wherein the pump-active rotor elements and the pump-active stator elements includes blades forming at least one pumping stage. 
   
   
       7 . A vacuum pump according to  claim 1 , wherein the at least one vacuum chamber has an opening, the vacuum pump further comprising a releasable cover for closing the opening, and at least two seals for sealing the opening. 
   
   
       8 . A vacuum pump according to  claim 7 , comprising an annular channel arranged between the two seals and in which vacuum is produced. 
   
   
       9 . A vacuum pump according to  claim 8 , comprising a connection conduit integrated in the housing between the annular channel and one of pumping stage and gas outlet channel. 
   
   
       10 . A vacuum pump according to  claim 1 , further comprising at least one further vacuum chamber, at least one of the at least one and further vacuum chambers being located in an insertable module.