Pump Unit for Supplying Chemical Liquids

Abstract

A pump unit for supplying chemical liquids capable of reducing the trapping of air bubbles and chemical liquids inside the chemical liquid passage of the unit while reducing the size by forming the pump and open/close valves in the vicinity of the pump into a single unit. The pump unit 10 is formed by integrally mounting a suction-side passage member 17 with which a suction-side shutoff valve 13 is assembled together and a discharge-side passage member 18 with which a discharge side shutoff valve 14 is assembled together on the pump 11 (pump housings 21, 22 ). Suction passages 17 a and 21 b and discharge passages 18 a and 21 c communicating with a pump chamber 25 are disposed on the same line L 1.

1 .- 6 . (canceled)  
   
   
       7 . A pump unit for supplying chemical liquids, provided with a pump having a pump chamber for suctioning and discharging a chemical liquid, a suction-side open/close valve that is connected to the pump chamber and which opens/closes a suctioning passage for suctioning the chemical liquid into the pump chamber, and a discharge-side open/close valve that is connected to the pump chamber and which opens/closes a discharging passage for discharging the chemical liquid from the pump chamber; wherein 
 both the suctioning passage and the discharging passage are nearly linear in shape and are disposed on the same line; and the pump, the suction-side open/close valve, and the discharge-side open/close valve are assembled together; and    the pump unit, also provided with a suction-side passage member with which the suction-side open/close valve is assembled together, and a discharge-side passage member with which the discharge-side open/close valve is assembled together; and wherein    the pump has a pump housing, and the pump housing has a thin flat shape provided with an internal diaphragm that comprises part of the pump chamber,    the suction-side passage member and the discharge-side passage member are both rod-shaped and are disposed along the flat direction of the pump housing, and    the suction-side open/close valve and the discharge-side open/close valve are disposed perpendicularly to the suction-side passage member and the discharge-side passage member, respectively, and along the flat direction of the pump housing.    
   
   
       8 . The pump unit for supplying chemical liquids according to  claim 7 , wherein the pump housing and the passage members have internal passages, 
 a seal ring for preventing the chemical liquid inside the internal passages of the pump housing and the passage members from leaking through the gap between the pump housing and the individual passage member is provided between the pump housing and the individual passage member, and    an inner peripheral surface of the seal ring is formed in a shape that is smoothly continuous with inner peripheral surfaces of the internal passages upstream and downstream of the seal ring.    
   
   
       9 . The pump unit for supplying chemical liquids according to  claim 8 , wherein a suckback valve that sucks in a predetermined amount of the chemical liquid inside the discharge passage is assembled into the downstream side of the suction-side open/close valve.  
   
   
       10 . The pump unit for supplying chemical liquids according to  claim 9 , wherein at least one of the valves is operated by operating air that is supplied/withdrawn and at least one of the electro-pneumatic regulators that control the operating air is integrally assembled.  
   
   
       11 . The pump unit for supplying chemical liquids according to  claim 7 , wherein a suckback valve that sucks in a predetermined amount of the chemical liquid inside the discharge passage is assembled into the downstream side of the suction-side open/close valve.  
   
   
       12 . The pump unit for supplying chemical liquids according to  claim 11 , wherein at least one of the valves is operated by operating air that is supplied/withdrawn and at least one of the electro-pneumatic regulators that control the operating air is integrally assembled.  
   
   
       13 . The pump unit for supplying chemical liquids according to  claim 7 , wherein at least one of the valves is operated by operating air that is supplied/withdrawn and at least one of the electro-pneumatic regulators that control the operating air is integrally assembled.