Barrier films for plastic substrates fabricated by atomic layer deposition

Abstract

Gas permeation barriers can be deposited on plastic or glass substrates by atomic layer deposition (ALD). The use of the ALD coatings can reduce permeation by many orders of magnitude at thicknesses of tens of nanometers with low concentrations of coating defects. These thin coatings preserve the flexibility and transparency of the plastic substrate. Such articles are useful in container, electrical and electronic applications.

1 . An article comprising: 
 a) a substrate made of a material selected from the group consisting of plastic and glass, and    b) a gas permeation barrier deposited on said substrate by atomic layer deposition.    
   
   
       2 . An article comprising: 
 a) a substrate made of a material selected from the group consisting of plastic and glass,    b) an adhesion layer coated, and    c) a gas permeation barrier deposited an said substrate by atomic layer deposition.    
   
   
       3 . An article comprising: 
 a) a substrate made of a material selected from the group consisting of plastic and glass,    b) an organic semiconductor, and    c) a gas permeation barrier deposited by atomic layer deposition.    
   
   
       4 . An article comprising: 
 a) a substrate made of a material selected from the group consisting of plastic and glass,    b) a liquid crystal polymer, and    c) a gas permeation barrier deposited by atomic layer deposition    
   
   
       5 . The article of any one of claims  1 ,  2 ,  3  or  4  where the article is an enclosed container.  
   
   
       6 . The article of any one of claims  1 ,  2 ,  3  or  4  where the article is an electrical or electronic device.  
   
   
       7 . The article of any one of claims  1 ,  2 ,  3  or  4  where the article is a light-emitting polymer device.  
   
   
       8 . The article of any one of claims  1 ,  2 ,  3  or  4  where the article is an organic light emitting diode.  
   
   
       9 . The article of any one of claims  1 ,  2 ,  3  or  4  where the article is a transistor.  
   
   
       10 . The article of any one of claims  1 ,  2 ,  3  or  4  where the article is a circuit comprising a light emitting polymer device.  
   
   
       11 . The article of any one of claims  1 ,  2 ,  3  or  4  where the article is a circuit comprising a transistor.  
   
   
       12 . The article of any one of claims  1 ,  2 ,  3  or  4  wherein the article is an organic photovoltaic cell.  
   
   
       13 . The article of any one of claims  1 ,  2 ,  3  or  4  wherein the a gas permeation barrier deposited by atomic layer deposition is deposited on a top side and a bottom side of the polymer.  
   
   
       14 . A second article comprising a plurality of layers, each layer comprising one article, as described in any one of claims  1 ,  2 ,  3  or  4 , wherein articles are in contact to each other.  
   
   
       15 . The second article of  claim 11  wherein the articles of any one of claims  1 ,  2 ,  3  or  4  are in contact with each other by lamination means.  
   
   
       16 . The article of any one of claims  1 ,  2 ,  3  or  4  wherein the article is a liquid crystal display.