Anisotropic conductive connector and circuit-device electrical inspection device

Abstract

An anisotropically conductive connector having a frame plate, in which a plurality of openings have been formed in accordance with a pattern corresponding to electrodes to be connected, and an elastic anisotropically conductive film composed of a plurality of functional parts arranged in the respective openings of the frame plate. The conductive film is composed of a conductive part for connection extending in a thickness-wise direction of the film and an insulating part formed integrally with the conductive part. Conductive parts for high-frequency shielding are arranged to surround each of the conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction, and are formed in the part to be supported in the elastic anisotropically conductive film. The frame plate is connected to a ground.

1 . An anisotropically conductive connector comprising: 
 a frame plate having conductivity, in which a plurality of openings have been formed in accordance with a pattern corresponding to electrodes to be connected; and    an elastic anisotropically conductive film composed of a plurality of functional parts arranged in the respective openings of the frame plate and composed of a conductive part for connection extending in a thickness-wise direction of the film and an insulating part formed integrally with the periphery of the conductive part, and a part to be supported, which is formed integrally with the peripheries of the functional parts and fixed to the frame plate by being laminated on the frame plate,    wherein conductive parts for high-frequency shielding arranged so as to surround the each of conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction are formed in the part to be supported in the elastic anisotropically conductive film, and the frame plate is connected to a ground.    
   
   
       2 . An anisotropically conductive connector comprising: 
 a frame plate having conductivity, in which an opening extending through in a thickness-wise direction has been formed; and    an elastic anisotropically conductive film arranged in the opening of the frame plate and composed of a functional part having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in the thickness-wise direction and an insulating part mutually insulating the conductive parts for connection, and a part to be supported, which is formed integrally with the periphery of the functional part and fixed to the frame plate by being laminated on the frame plate,    wherein a conductive part for high-frequency shielding arranged so as to surround a group of conductive parts including the plurality of the conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction is formed in the part to be supported in the elastic anisotropically conductive film, and the frame plate is connected to a ground.    
   
   
       3 . An anisotropically conductive connector comprising: 
 a frame plate having conductivity, in which a plurality of openings have been formed in accordance with a pattern corresponding to electrodes to be connected; and    an elastic anisotropically conductive film composed of a plurality of functional parts arranged in the respective openings of the frame plate and composed of a conductive part for connection extending in a thickness-wise direction of the film and an insulating part formed integrally with the periphery of the conductive part, and a part to be supported, which is formed integrally with the peripheries of the functional parts and fixed to the frame plate by being laminated on the frame plate,    wherein a conductive part for high-frequency shielding arranged so as to surround a group of conductive parts including the plurality of the conductive parts for connection, electrically connected to the frame plate and extending in the thickness-wise direction is formed in the part to be supported in the elastic anisotropically conductive film, and the frame plate is connected to a ground.    
   
   
       4 . The anisotropically conductive connector according to  claim 1 , which comprises a plurality of conductive parts for high-frequency shielding for surrounding the same conductive part for connection.  
   
   
       5 . The anisotropically conductive connector according to  claim 4 , wherein a clearance distance between conductive parts for high-frequency shielding adjoining each other, which surround the same conductive part for connection, is at most 1/10 of a wavelength of a measurement signal.  
   
   
       6 . The anisotropically conductive connector according to  claim 2 , wherein one or more conductive parts for non-connection are formed in addition to the conductive parts for connection in the elastic anisotropically conductive film, and the conductive parts for high-frequency shielding are arranged so as to surround a group of conductive parts including the plurality of the conductive parts for connection and one or more conductive parts for non-connection.  
   
   
       7 . The anisotropically conductive connector according to  claim 2 ,  3  or  6 , which comprises a plurality of conductive parts for high-frequency shielding surrounding the group of conductive parts including the plurality of the conductive parts for connection.  
   
   
       8 . The anisotropically conductive connector according to  claim 7 , wherein a clearance distance between conductive parts for high-frequency shielding adjoining each other, which surround the group of conductive parts, is at most 1/10 of a wavelength of a measurement signal.  
   
   
       9 . An electrical inspection apparatus for circuit devices, which comprises the anisotropically conductive connector according to  claim 1 ,  2 ,  3 ,  4 ,  5  or  6 .  
   
   
       10 . An electrical inspection apparatus for circuit devices, comprising: 
 a circuit board for inspection, on which inspection electrodes have been formed in accordance with a pattern corresponding to electrodes to be inspected of a circuit device, which is an object of inspection, and the anisotropically conductive connector according to  claim 1 ,  2  or  3 , which is arranged on the circuit board for inspection,    wherein in the circuit board for inspection, grounding electrodes connected to a ground are formed in accordance with a pattern corresponding to the conductive parts for high-frequency shielding in the anisotropically conductive connector.    
   
   
       11 . An electrical inspection apparatus for circuit devices, comprising: 
 a circuit board for inspection, on which inspection electrodes have been formed in accordance with a pattern corresponding to electrodes to be inspected of a circuit device, which is an object of inspection, and the anisotropically conductive connector according to  claim 1 ,  2  or  3 , which is arranged on the circuit board for inspection,    wherein the frame plate in the anisotropically conductive connector is connected to a ground.