Cleaning apparatus and cleaning method

Abstract

A cleaning apparatus in which cleaning and drying can be carried out without the risk of reverse contamination of the cleaned object after the drying process. The cleaning apparatus includes a supporting device for supporting an object to be cleaned, and a cleaning cup surrounding the supporting device to prevent splashing of a cleaning liquid. The cleaning apparatus includes a cleaning device for cleaning an inner wall of the cleaning cup with a cleaning liquid.

1 . A cleaning apparatus comprising: 
 a supporting device for supporting an object to be cleaned;    a cleaning cup surrounding said supporting device to prevent splashing of a cleaning liquid; and    a cleaning device for cleaning an inner wall of said cleaning cup with a cleaning liquid.    
   
   
       2 . A cleaning apparatus according to  claim 1 , further comprising: 
 a cleaning vessel surrounding said cleaning cup;    wherein said cleaning device cleans both the inner wall of said cleaning cup and an inner wall of said cleaning vessel.    
   
   
       3 . A cleaning apparatus according to  claim 1 , wherein said cleaning device cleans also said supporting device.  
   
   
       4 . A cleaning apparatus according to  claim 1 , wherein said cleaning apparatus has a plurality of cleaning devices, and each cleaning device cleans said cleaning cup, cleaning vessel and supporting device, respectively.  
   
   
       5 . A cleaning apparatus according to  claim 1 , wherein cleaning for said object to be cleaned is continued for a predetermined period of time even after completion of cleaning of said cleaning cup, cleaning vessel and supporting device by said cleaning device.