Sheet for mounting polishing workpiece and method for making the same

Abstract

The present invention relates to a sheet for mounting a polishing workpiece. The sheet comprises a substrate, a surface layer and a slightly rough layer. The substrate has a surface. The surface layer is located on the surface of the substrate, with no hole structure existing in the interior thereof, and has a surface. The slightly rough layer is located on the surface of the surface layer to carry and mount the polishing workpiece, with no hole structure existing in the interior thereof. Accordingly, when the polishing workpiece contacts the slightly rough layer, the air therebetween is easily vented out via the slightly rough layer, without the phenomenon of air wrapping, which increases the adsorption force between the polishing workpiece and the sheet.

1 . A method for making a sheet for mounting a polishing workpiece, comprising the following steps of:
 (a) forming a surface layer on a release paper, the surface layer having no hole structure in the interior thereof;   (b) forming a substrate on the surface layer;   (c) drying the surface layer and the substrate;   (d) removing the release paper; and   (e) printing a slightly rough layer on the surface layer, the slightly rough layer having no hole structure in the interior thereof.   
     
     
         2 . The method as claimed in  claim 1 , wherein the substrate has a plurality of holes in the interior thereof. 
     
     
         3 . The method as claimed in  claim 2 , wherein the holes of the substrate are of a continuous type. 
     
     
         4 . The method as claimed in  claim 2 , wherein the holes of the substrate are of a discontinuous type. 
     
     
         5 . The method as claimed in  claim 1 , wherein the surface layer is formed on the release paper in a manner of coating in the step (a). 
     
     
         6 . The method as claimed in  claim 1 , wherein the substrate is formed on the surface layer in a manner of coating in the step (b). 
     
     
         7 . The method as claimed in  claim 1 , wherein the slightly rough layer is printed on the surface layer in a manner of screen printing in the step (e). 
     
     
         8 . The method as claimed in  claim 1 , further comprising a step of performing a water repellent treatment for the slightly rough layer.