Polishing pad having surface texture

Abstract

The present invention relates to a polishing pad having a surface texture. The surface texture is disposed on the polishing surface of the polishing pad. The surface texture comprises at least one first groove, at least one second groove, and a plurality of holes. The second groove extends from a central portion of the polishing pad to the edge of the polishing pad, and the first groove(s) is intersected with the second groove(s) to form a plurality of intersection points. The holes are disposed at the intersection points, and the depth of the holes is larger than that of the first groove. Thus, the second groove(s) enables impurities suspended in the polishing slurry to be quickly removed from the polishing pad, and the holes can store the polishing slurry to delay the polishing particles in the polishing slurry from departing from the polishing pad.

1 . A polishing pad comprising:
 a textured polishing surface;   at least one first groove exposed at and formed in the textured polishing surface;   at least one second groove exposed at and formed in the textured polishing surface, the at least one second groove extending from a central portion of the polishing surface to an edge of the polishing surface, wherein the at least one first groove intersects with the at least one second groove to form a plurality of intersection points; and   a plurality of holes exposed at and formed in the textured polishing surface, the plurality of holes disposed at the intersection points, wherein the depth of the holes is larger than that of the at least one first groove.   
     
     
         2 . The polishing pad as claimed in  claim 1 , wherein the at least one first groove comprises a plurality of concentric circular grooves surrounding a center of the textured polishing surface. 
     
     
         3 . The polishing pad as claimed in  claim 1 , wherein the at least one first groove comprises a plurality of concentric rectangular grooves surrounding a center of the textured polishing surface. 
     
     
         4 . The polishing pad as claimed in  claim 1 , wherein the at least one first groove is a spiral groove. 
     
     
         5 . The polishing pad as claimed in  claim 1 , wherein the at least one second groove comprises a plurality of radial grooves. 
     
     
         6 . The polishing pad as claimed in  claim 5 , wherein each of the radial grooves is a linear groove. 
     
     
         7 . The polishing pad as claimed in  claim 5 , wherein each of the radial grooves is an arced groove. 
     
     
         8 . A polishing pad comprising:
 a textured polishing surface;   a plurality of concentric circular grooves exposed at and located in the textured polishing surface;   a plurality of radial grooves exposed at and located in the textured polishing surface, the plurality of radial groove extending from a central portion of the polishing surface to an edge of the polishing surface, wherein the circular grooves intersect with the radial grooves to form a plurality of intersection points; and   a plurality of the first holes exposed at and located in the textured polishing surface, wherein the plurality of first holes are disposed at the intersection points, and wherein the depth of the holes is larger than that of the circular grooves.   
     
     
         9 . The polishing pad as claimed in  claim 8 , wherein each of the radial grooves is a linear groove. 
     
     
         10 . The polishing pad as claimed in  claim 8 , wherein each of the radial grooves is an arced groove. 
     
     
         11 . The polishing pad as claimed in  claim 8 , further comprising a plurality of the second holes disposed on the circular grooves and spaced from the intersection points. 
     
     
         12 . The polishing pad as claimed in  claim 1 , wherein the holes are blind holes. 
     
     
         13 . The polishing pad as claimed in  claim 1 , wherein a diameter of the holes is larger than a width of the at least one first groove and a width of the at least one second groove. 
     
     
         14 . The polishing pad as claimed in  claim 8 , wherein a diameter of the first holes is larger than a width of the circular grooves and a width of the radials grooves. 
     
     
         15 . The polishing pad as claimed in  claim 11 , wherein a diameter of the second holes is larger than a width of the circular grooves.