Apparatus and method of transporting and loading probe devices of a metrology instrument

Abstract

The preferred embodiments are directed to a probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices.

1 . A probe cassette for a scanning probe microscope (SPM), the probe cassette comprising: 
 a base having at least one probe storage receptacle;    a lid mountable on the base so as to at least substantially cover the at least one receptacle; and    a probe retainer that retains a probe device for use in the SPM in the receptacle under a compressive force.    
     
     
         2 . (canceled)  
     
     
         3 . The probe cassette as in  claim 1 , wherein the compressive force is generated by deforming a compliant element.  
     
     
         4 . The probe cassette as in  claim 3 , wherein the compliant element is at least one of a group including a spring and a spring washer.  
     
     
         5 . The probe cassette as in  claim 3 , wherein the probe retainer forms at least part of the compliant element.  
     
     
         6 . The probe cassette as in  claim 3 , wherein the compliant element is mounted on the lid independent of the probe retainer.  
     
     
         7 . The probe cassette as recited in  claim 1 , wherein the probe retainer includes a surface that contacts the probe device when the lid is coupled to the base and does not contact the probe device upon lid removal.  
     
     
         8 . The probe cassette as recited in  claim 7 , wherein at least the surface of the probe retainer that contacts the probe device is non-stick.  
     
     
         9 . The probe cassette as recited in  claim 8 , wherein the probe retainer has a surface energy less than about 30 ergs/cm 2 .  
     
     
         10 . The probe cassette as recited in  claim 9 , wherein the probe retainer has a surface energy less than about 20 ergs/cm 2 .  
     
     
         11 . The probe cassette as recited in  claim 8 , wherein the surface of the probe retainer is conductive and is formed using a polymer.  
     
     
         12 . The probe cassette as recited in  claim 11 , wherein the polymer is carbon impregnated PTFE.  
     
     
         13 . The probe cassette as recited in  claim 1 , wherein the probe retainer includes a surface that contacts the probe device when the lid is coupled to the base, and wherein the surface is conductive.  
     
     
         14 . The probe cassette as recited in  claim 13 , wherein the surface is formed from carbon impregnated PTFE.  
     
     
         15 . The probe cassette as recited in  claim 1 , wherein the base is directly mountable in the SPM such that the probe device can be automatically loaded onto a probe mount of the SPM.  
     
     
         16 . The probe cassette as recited in  claim 1 , wherein the probe cassette is pre-loaded with the at least one probe device so that when shipped, the probe device is automatically loadable onto a probe mount of the SPM.  
     
     
         17 . An apparatus comprising: 
 a probe cassette in which at least one probe device is retained therein under a compressive force.    
     
     
         18 . The apparatus of  claim 17 , further comprising a non-stick probe retainer that contacts the probe device under the compressive force.  
     
     
         19 . The apparatus of  claim 18 , wherein the compressive force is provided by the probe retainer.  
     
     
         20 . The apparatus of  claim 19 , wherein the probe retainer includes carbon impregnated PTFE.  
     
     
         21 . The apparatus of  claim 18 , wherein the compressive force is generated by deforming a compliant element.  
     
     
         22 . The apparatus of  claim 21 , wherein the compliant element is the probe retainer.  
     
     
         23 . A method comprising: 
 retaining a probe device of a scanning probe microscope in a receptacle of a probe cassette by applying a compressive force against the probe device.    
     
     
         24 . The method of  claim 23 , further comprising providing a non-stick probe retainer having a non-stick surface that contacts the probe device under the compressive force.  
     
     
         25 . The method of  claim 24 , wherein the compressive force is provided by the probe retainer.  
     
     
         26 . The method of  claim 25 , wherein the probe retainer is formed from carbon impregnated PTFE.  
     
     
         27 . A method comprising: 
 loading a probe device into a base of a probe cassette;    applying a compressive force to the probe device to retain the probe device in the base; and    mounting the base in a scanning probe microscope (SPM);    releasing the compressive force; and then    automatically loading the probe device onto a probe mount of the SPM.    
     
     
         28 . The method of  claim 27 , wherein the compressive force is generated by deforming a compliant element.  
     
     
         29 . The method of  claim 28 , wherein the compliant element is a probe retainer, and wherein the probe retainer includes a surface that contacts the probe device when the lid is in place and releases from the probe device upon lid removal.  
     
     
         30 . The method of  claim 29 , wherein the probe retainer includes a surface that contacts the probe device when the lid is in place, and wherein the surface is at least one of non-stick and conductive.  
     
     
         31 . The method of  claim 30 , wherein the surface is formed from a carbon impregnated PTFE.  
     
     
         32 . The method of  claim 27 , further comprising: 
 shipping the probe cassette prior to said mounting step, wherein the probe cassette is pre-loaded with the probe device.    
     
     
         33 . The probe cassette as in  claim 1 , wherein the compressive force is generated by deforming at least one of a part of the lid and the probe retainer.