Container Opening-Closing Apparatus and Container-Placement-Position Adjustment Method for the Same

Abstract

A container opening-closing apparatus 1 includes at least a dock plate 31 for supporting and positioning a container 10 capable of accommodating a plurality of semiconductor wafers 14 ; a dock-moving mechanism 30 for moving the dock plate 31 between a container transfer position and a work position where a container door 13 is attached and detached; a port door 23 including an attaching-detaching mechanism for attaching and detaching the container door 13 and a holding mechanism for holding the container door 13 ; a port-door advancing-retracting mechanism for horizontally moving the port door 23 ; a port-door elevating mechanism for vertically moving the port door 23 with the container door 13 held thereby so as to store the container door 13 ; and a port plate 21 having an opening closed by the port door 23 , wherein the dock-moving mechanism 30 includes stop position changing means for changing the stop position of the dock plate 31 to a desired position.

1 . A container opening-closing apparatus comprising at least: 
 a dock plate for supporting and positioning a container capable of accommodating a plurality of semiconductor wafers oriented horizontally and arranged at predetermined intervals;    a dock-moving mechanism for moving the dock plate between a container transfer position and a work position where a container door is attached and detached;    a port door including an attaching-detaching mechanism for attaching and detaching the container door and a holding mechanism for holding the container door;    a port-door advancing-retracting mechanism for horizontally moving the port door;    a port-door elevating mechanism for vertically moving the port door with the container door held thereby so as to store the container door; and    a port plate having an opening closed by the port door,    wherein the dock-moving mechanism includes stop position changing means for changing a stop position of the dock plate to a desired position.    
   
   
       2 . A container opening-closing apparatus according to  claim 1 , wherein the stop position changing means includes control means for changing the stop position of the dock plate to a desired position by means of numerical control.  
   
   
       3 . A container opening-closing apparatus according to  claim 1 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the stop position of the dock plate can be changed to a desired position in the X-axis direction.  
   
   
       4 . A container opening-closing apparatus according to  claim 1 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the stop position of the dock plate can be changed to desired positions in the X-axis and Y-axis directions.  
   
   
       5 . A container opening-closing apparatus comprising at least: 
 a dock plate for supporting and positioning a container capable of accommodating a plurality of semiconductor wafers oriented horizontally and arranged at predetermined intervals;    a dock-moving mechanism for moving the dock plate between a container transfer position and a work position where a container door is attached and detached;    a port door including an attaching-detaching mechanism for attaching and detaching the container door and a holding mechanism for holding the container door;    a port-door advancing-retracting mechanism for horizontally moving the port door;    a port-door elevating mechanism for vertically moving the port door with the container door held thereby so as to store the container door; and    a port plate having an opening closed by the port door,    wherein the dock-moving mechanism includes stop position checking means for checking a stop position of the dock plate, and installation position changing means for changing the installation position of the stop position checking means to a desired position.    
   
   
       6 . A container opening-closing apparatus according to  claim 5 , wherein the installation position changing means includes control means for changing the installation position of the stop position checking means to a desired position by means of numerical control.  
   
   
       7 . A container opening-closing apparatus according to  claim 5 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the installation position of the stop position checking means can be changed to a desired position in the X-axis direction.  
   
   
       8 . A container opening-closing apparatus according to  claim 5 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the installation position of the stop position checking means can be changed to desired positions in the X-axis and Y-axis directions.  
   
   
       9 . A container-placement-position adjustment method for a container opening-closing apparatus comprising at least: 
 container placement means for supporting and positioning a container capable of accommodating a plurality of semiconductor wafers oriented horizontally and arranged at predetermined intervals;    moving means for moving the container placement means between a container transfer position and a work position where a container door is attached and detached; and    attaching-detaching means for attaching and detaching the container door of the container placed on the container placement means moved to the work position by the moving means,    wherein the moving means can change a stop position of the container placement means to a desired position.    
   
   
       10 . A container-placement-position adjustment method for a container opening-closing apparatus according to  claim 9 , wherein the moving means changes the stop position of the container placement means to a desired position by means of numerical control.  
   
   
       11 . A container-placement-position adjustment method for a container opening-closing apparatus comprising at least: 
 container placement means for supporting and positioning a container capable of accommodating a plurality of semiconductor wafers oriented horizontally and arranged at predetermined intervals;    moving means for moving the container placement means between a container transfer position and a work position where a container door is attached and detached; and    attaching-detaching means for attaching and detaching the container door of the container placed on the container placement means moved to the work position by the moving means,    wherein the moving means can change to a desired position a position for checking a stop position of the container placement means.    
   
   
       12 . A container-placement-position adjustment method for a container opening-closing apparatus according to  claim 11 , wherein the moving means changes the position for checking the stop position of the container placement means to a desired position by means of numerical control.  
   
   
       13 . A container opening-closing apparatus according to  claim 2 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the stop position of the dock plate can be changed to a desired position in the X-axis direction.  
   
   
       14 . A container opening-closing apparatus according to  claim 2 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the stop position of the dock plate can be changed to desired positions in the X-axis and Y-axis directions.  
   
   
       15 . A container opening-closing apparatus according to  claim 6 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the installation position of the stop position checking means can be changed to a desired position in the X-axis direction.  
   
   
       16 . A container opening-closing apparatus according to  claim 6 , wherein when a moving direction along which the dock plate moves for removal of the container door is defined as an X-axis direction and a direction perpendicular to the X-axis direction is defined as a Y-axis direction, the installation position of the stop position checking means can be changed to desired positions in the X-axis and Y-axis directions.