Micro Impedance Pump For Fluid Logic, Mixing and Separation

Abstract

An impedance pump system formed on a rigid substrate is substantially planar, in a plane defined by a substrate. A micro machined opening is made in the substrate, and an impedance pump, formed by a lumen which can be a tubular elastic device having two different fluidic impedances with a wave reflection site therebetween, is formed within the opening. An actuator is formed to pump using the device.

1 . A pumping system, comprising: 
 a substrate, formed of a material that can be micromachined;    at least one lumen opening formed in said substrate, said lumen opening being substantially extending along an axis of the substrate, said lumen opening including at least a first portion having a first fluidic characteristic, and a second portion having at least a second fluidic characteristic, and a wave reflection interface between said first and second portions;    an actuator, formed adjacent said lumen opening in said substrate, and formed to actuate in an area of the lumen opening to pump fluid within the lumen opening; and    a controller connection to said actuator, also formed in said substrate, operative to allow control of said actuator.    
   
   
       2 . A system as in  claim 1 , further comprising a tubular material in said lumen opening.  
   
   
       3 . A system as in  claim 1 , wherein said lumen opening comprises an opening which is etched in the substrate material, and further comprising at least one deformable material within the etched substrate material.  
   
   
       4 . A system as in  claim 3 , further comprising a second material, in said lumen opening, the first and second materials collectively forming a multilayer lumen.  
   
   
       5 . A system as in  claim 4 , wherein said second material is a rigid material.  
   
   
       6 . A system as in  claim 4 , wherein said actuator is formed between said first and second materials.  
   
   
       7 . A system as in  claim 3 , wherein said actuator is formed outside of said deformable material.  
   
   
       8 . A system as in  claim 1 , further comprising a second actuator.  
   
   
       9 . A system as in  claim 1 , further comprising a controller, coupled to said controller connection, which operates to excite said lumen in a way that creates constructive wave interactions based on reflections from said wave reflection interface.  
   
   
       10 . A system as in  claim 1 , wherein said actuator is a deposited thin film.  
   
   
       11 . A system as in  claim 1 , wherein said walls are formed of a rigid material.  
   
   
       12 . A system as in  claim 1 , wherein said walls are formed by micro-molding.  
   
   
       13 . A method comprising: 
 Micromachining at least one lumen opening formed in a substrate to extend along an axis of the substrate, said micromachining forming an opening including at least a first portion having a first fluidic characteristic, and a second portion having at least a second fluidic characteristic, and a wave reflection interface between said first and second portions;    Forming an actuator adjacent said lumen opening in said substrate in a location to actuate in an area of the lumen opening and to pump fluid within the lumen opening; and    Controlling the actuator in a way to form constructive wave reflection at said wave reflection interface and to pump fluid.    
   
   
       14 . A method as in  claim 13 , further comprising depositing a tubular material in said lumen opening.  
   
   
       15 . A method as in  claim 14 , wherein said tubular material includes at least one deformable material within the etched substrate material.  
   
   
       16 . A method as in  claim 15 , further comprising depositing a second material in said lumen opening, the first and second materials collectively forming a multilayer lumen material.  
   
   
       17 . A method as in  claim 16 , wherein said second material is a rigid material.  
   
   
       18 . A method as in  claim 16 , wherein said actuator is formed between said first and second materials.  
   
   
       19 . A method as in  claim 15 , wherein said actuator is formed outside of said deformable material.  
   
   
       20 . A method as in  claim 1 , further comprising using a second actuator in addition to said actuator, to pump fluids.  
   
   
       21 . A method as in  claim 13 , wherein said actuator includes a deposited thin film.  
   
   
       22 . A pumping system, comprising: 
 at least one lumen, formed of a first layer that is substantially rigid, and a second layer, inside said first layer, that is flexible, said lumen having at least a first portion having a first fluidic characteristic and a second portion having at least a second fluidic characteristic with at wave reflection interface between said first and second portions;    an actuator, formed adjacent said flexible portion of said lumen to actuate in an area of the lumen in a way that allows pumping of fluid within the lumen; and    a controller connection to said actuator, also formed in said substrate, operative to allow control of said actuator.    
   
   
       23 . A system as in  claim 22 , wherein said lumen is tubular in shape.  
   
   
       24 . A system as in  claim 22 , wherein said actuator is formed between said first and second layers.