US2008026234A1PendingUtilityA1

Epitaxial oxide films via nitride conversion

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Assignee: SAMBASIVAN SANKARPriority: Oct 13, 2000Filed: Apr 24, 2007Published: Jan 31, 2008
Est. expiryOct 13, 2020(expired)· nominal 20-yr term from priority
Inventors:Sankar SambasivanScott A. BarnettIlwon KimJohn Rechner
B32B 15/04C30B 29/225C30B 23/02C30B 29/38C30B 33/005C30B 29/22H10N 60/0632C23C 8/02
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Claims

Abstract

The present invention relates to oxides on suitable substrates, as converted from nitride precursors.

Claims

exact text as granted — not AI-modified
1 . A composite comprising a metal oxide layer on a metal substrate, said oxide layer having a substantially cubic crystalline structure and a substantially single epitaxial orientation, said oxide layer substantially without a nitride component, said oxide layer obtainable from the oxidation of a metal nitride composition deposited on said substrate.  
   
   
       2 . The composite of  claim 1  wherein said metal oxide is stabilized with a solute.  
   
   
       3 . The composite of  claim 1  wherein said metal oxide is a yttria stabilized zirconia.  
   
   
       4 . The composite of  claim 1  wherein said metal substrate is a nickel alloy.  
   
   
       5 . The composite of  claim 4  wherein said metal substrate is a nickel-chromium alloy.

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