Microfluidic large scale integration

Abstract

High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

1 .- 22 . (canceled) 
   
   
       23 . A microfabricated structure comprising:
 an array of storage locations defined by a first plurality of parallel flow channels orthogonal to a second plurality of parallel flow channels;   a network of control lines adjacent to the storage locations to define deflectable valves for isolating the storage locations;   a first multiplexor structure configured to govern flow through the first plurality of parallel flow channels; and   a second multiplexor structure configured to govern flow through the second plurality of parallel flow channels.   
   
   
       24 . The microfabricated structure of  claim 23  wherein:
 the first plurality of parallel flow channels and the second plurality of parallel flow channels are formed in the same elastomer layer to define the array of storage locations at the intersection of the first plurality of flow channels and the second plurality of flow channels; and   the first and second multiplexors are formed in the same elastomer layer as the control channel network   
   
   
       25 . The microfabricated structure of  claim 24  further comprising a second network of control channels formed in the elastomer layer of the plurality of flow channels overlying or underlying the first multiplexor. 
   
   
       26 . The microfabricated structure of  claim 24  further comprising a plurality of bus lines adjacent to the first plurality of flow channels to permit selective access to the storage locations. 
   
   
       27 . The microfabricated structure of  claim 23  wherein:
 the first plurality of parallel flow channels and the second plurality of parallel flow channels are formed in different elastomer layers;   the array of storage locations is defined by a chamber formed in an intervening elastomer layer between the first and second plurality of flow channels; and   one of the first plurality of parallel flow channels is in vertical fluid communication with a chamber through a first one-way valve; and   the chamber is in vertical fluid communication with one of the second plurality of parallel flow channels through a second one-way valve.   
   
   
       28 . The microfabricated structure of  claim 27  wherein the one-way valves comprise a elastomer membrane configured to rest on a seat and to deflect in one vertical direction only. 
   
   
       29 . The microfabricated structure of  claim 28  wherein the one-way valves are configured to deflect upward. 
   
   
       30 .- 53 . (canceled)