Systems and Methods for Precision Plasma Processing

Abstract

A tool for modifying a surface of a workpiece comprises a heat source having a modifiable footprint for heating a selectable portion of the surface, a reactive atom plasma torch, and a reactive precursor receivable within a plasma of the reactive atom plasma torch. The reactive cursor is received by the plasma to form a reactive species that chemically combines with a portion of the surface heated by the footprint of the heat source to produce a gas and leave the surface.

1 . A tool for modifying a surface of a workpiece, comprising: 
 a heat source having a modifiable footprint for heating a selectable portion of the surface;    a reactive atom plasma torch; and    a reactive precursor receivable within a plasma of the reactive atom plasma torch to form a reactive species that chemically combines with a portion of the surface heated by the footprint of the heat source to produce a gas and leave the surface;    wherein the reactive species preferentially combines with the heated portion.    
     
     
         2 . The tool of  claim 1 , wherein the heat source is one of a laser, a flame, and plasma.  
     
     
         3 . The tool of  claim 1 , wherein the workpiece is movable relative to the reactive atom plasma torch and the heat source so that the reactive atom plasma torch.  
     
     
         4 . The tool of  claim 1 , wherein the reactive plasma torch and the heat source are movable relative to the workpiece.  
     
     
         5 . The tool of  claim 1 , wherein the footprint of the heat source and the reactive species are applied to the portion of the surface contemporaneously.  
     
     
         6 . The tool of  claim 1 , wherein the footprint of the heat source is applied to the portion of the surface prior to application of the reactive species to the portion of the surface.  
     
     
         7 . The tool of  claim 1 , wherein the reactive atom plasma torch has a footprint; and 
 wherein the footprint of the heat source is modifiable to overlap, subsume, and be subsumed by the footprint of the reactive atom plasma torch.    
     
     
         8 . The tool of  claim 1 , wherein the reactive atom plasma torch is one of an inductively coupled plasma torch, a flame torch, and a microwave-induced plasma source.  
     
     
         9 . A method for selectively altering a workpiece, comprising: 
 heating a portion of the workpiece with a heat source having a modifiable footprint; and    applying a reactive atom plasma torch to the heated portion;    modifying the heated portion with the reactive atom plasma torch;    wherein the reactive atom plasma torch modifies the heated portion preferentially to an unheated portion of the workpiece.    
     
     
         10 . The method of  claim 9 , further comprising: 
 supplying a reactive precursor to the reactive atom plasma torch.    
     
     
         11 . The method of  claim 9 , further comprising: 
 bringing the reactive atom plasma torch into proximity with the surface of the workpiece.    
     
     
         12 . The method of  claim 10 , further comprising producing a reactive species from the reactive precursor; and wherein: 
 modifying the heated portion causes the heated portion to chemically combine with the reactive species and leave the surface of the workpiece.    
     
     
         13 . The method of  claim 10 , further comprising: 
 producing a stream of atomic radicals from said reactive precursor.    
     
     
         14 . The method of  claim 9 , further comprising: 
 supplying a source of fuel to the reactive atom plasma torch.    
     
     
         15 . The method of  claim 9 , further comprising: 
 supplying a source of oxidizer gas to the reactive atom plasma torch.    
     
     
         16 . The method of  claim 9 , wherein modifying the heated portion comprises altering the heated portion chemically with the plasma.  
     
     
         17 . The method of  claim 9 , further comprising: 
 rotating the workpiece with respect to the reactive atom plasma torch.    
     
     
         18 . The method of  claim 9 , further comprising: 
 using multiple plasmas to speed up surface modification.    
     
     
         19 . The method of  claim 9 , further comprising: 
 modifying the footprint of the heat source to one of overlap, subsume, and be subsumed by the footprint of the reactive atom plasma torch.    
     
     
         20 . The method of  claim 9 , wherein the heat source is a laser; and 
 further comprising:    directing a beam of the laser via a controllable mirror.