Stannane Gas Supply System

Abstract

To provide a stannane gas supply system capable of supplying a stannane gas to an extreme ultraviolet ray radiation source with a stable flow rate. A stannane gas supply system for supplying a stannane gas to an extreme ultraviolet ray radiation source characterized by comprising a sealed container for storing a mixture of a stannane liquid and a stannane gas, connected with the extreme ultraviolet ray radiation source via a pipe, cooling means for cooling the sealed container to a temperature lower than −60° C., a low pressure mass flow controller provided in the pipe, a pressure detecting device mounted in the pipe part disposed between the sealed container and the low pressure mass flow controller, for detecting the pressure of the stannane gas in the pipe part, and controlling means for controlling the cooling degree of the sealed container by the cooling means based on the pressure detection value by the pressure detecting device.

1 . A stannane gas supply system which supplies a stannane gas to an extreme ultraviolet ray radiation source, characterized by comprising:
 a) a sealed container which stores a mixture of a stannane liquid and a stannane gas, connected with the extreme ultraviolet ray radiation source via a pipe;   b) cooling means for cooling the sealed container to a temperature lower than −60° C.;   c) a low pressure mass flow controller provided in the pipe;   d) a pressure detecting device which is mounted in the pipe portion disposed between the sealed container and the low pressure mass flow controller, and which detects the pressure of the stannane gas in the pipe portion; and   e) controlling means for controlling the cooling degree of the sealed container by the cooling means based on the pressure detection value by the pressure detecting device.   
   
   
       2 . The stannane gas supply system of  claim 1 , wherein the low pressure mass flow controller is capable of controlling the flow rate of the stannane gas in a pressure range of 50 to 300 Torr. 
   
   
       3 . The stannane gas supply system of  claim 1 , wherein the cooling means comprises a circulation pipe for circulating a coolant, a compressing device, a condensing device, an expansion valve and an evaporating device provided in the coolant flow direction in the circulation pipe, and
 the evaporating device comprises a freezing device as a winding part of the circulation pipe for winding around the sealed container.   
   
   
       4 . The stannane gas supply system of  claim 3 , wherein the controlling means comprises: a heated gas supply system having a housing which stores the sealed container, a heated gas supply pipe which supplies a gas of a temperature higher than the cooling temperature of the sealed container in the freezing device into the housing, and a control valve provided in the pipe; and
 a controlling device to which a pressure detection value signal from the pressure detecting device is inputted, and which adjusts the opening degree of the control valve of the heated gas supply system based on the inputted signal.   
   
   
       5 . The stannane gas supply system of  claim 3 , wherein the controlling means comprises a controlling device to which a pressure detection value signal from the pressure detecting device is inputted, and which adjusts the compression degree of the coolant by the compressing device of the freezing device based on the inputted signal. 
   
   
       6 . The stannane gas supply system of  claim 1 , wherein the cooling means is a cooling liquid supply system comprising: a supply source of a cooling liquid of −60° C. or lower; a cooling liquid supply pipe connected with the supply source and having the winding part of the sealed container; and a control valve provided in the pipe. 
   
   
       7 . The stannane gas supply system of  claim 6 , wherein the controlling means comprises a controlling device to which a pressure detection value signal from the pressure detecting device is inputted, and which adjusts the opening degree of the control valve of the cooling liquid supply system based on the inputted signal. 
   
   
       8 . The stannane gas supply system of  claim 6 , wherein the cooling liquid of −60° C. or lower is a low temperature liquefied gas selected from the group consisting of a liquid nitrogen, a liquid helium, a liquid argon and a liquid carbon dioxide.