Multiple shadow mask structure for deposition shadow mask protection and method of making and using same

Abstract

The present invention is a multi-layer shadow mask and method of use thereof. The multi-layer shadow mask includes a sacrificial mask bonded to a deposition mask. The sacrificial mask provides protection against an accumulation of evaporant on the deposition mask which would cause the deposition mask to deform.

1 . A multi-layer shadow mask comprising: 
 a deposition mask having at least one aperture therethrough; and    a sacrificial mask having at least one aperture therethrough, wherein:    the sacrificial mask and the deposition mask are coupled together with the one aperture of the sacrificial mask in alignment with the one aperture of the deposition mask; and    the sacrificial mask and the deposition mask are coupled in a manner whereupon adjacent the one aperture thereof the sacrificial mask is free to move away from the deposition mask to form a gap therebetween.    
   
   
       2 . The multi-layer shadow mask of  claim 1 , wherein adjacent the one aperture thereof the sacrificial mask moves away from the deposition mask and forms a gap therebetween in response to the accumulation of material on the sacrificial mask.  
   
   
       3 . The multi-layer shadow mask of  claim 1 , wherein the deposition mask and the sacrificial mask are both formed from the same material.  
   
   
       4 . The multi-layer shadow mask of  claim 3 , wherein the one aperture of the deposition mask and the one aperture of the sacrificial mask are the same size and shape.  
   
   
       5 . The multi-layer shadow mask of  claim 1 , wherein the deposition mask and the sacrificial mask are formed from different materials.  
   
   
       6 . The multi-layer shadow mask of  claim 5 , wherein the one aperture of the deposition mask and the one aperture of the sacrificial mask have different sizes.  
   
   
       7 . A multi-layer shadow mask comprising: 
 a plurality of stacked shadow masks that have been coupled together; and    a plurality of apertures formed through the plurality of stacked shadow masks, wherein the stacked shadow masks are coupled together such that adjacent at least one aperture one shadow mask is free to move away from an adjacent shadow mask to form a gap therebetween.    
   
   
       8 . The multi-layer shadow mask of  claim 7 , wherein adjacent the one aperture thereof the one shadow mask moves away from the adjacent shadow mask and forms a gap therebetween in response to the deposition of material on the one shadow mask.  
   
   
       9 . The multi-layer shadow mask of  claim 7 , wherein the shadow masks are formed from the same material.  
   
   
       10 . The multi-layer shadow mask of  claim 9 , wherein the material is at least one of nickel, chromium, steel, copper, Kovar® and Invar®.