Power Delivery Control and Balancing Between Multiple Loads

Abstract

A plasma process machine includes at least two electrodes disposed in a processing chamber and in contact with targets, an alternating current source connected to supply power to the electrodes, and a power delivery controller adapted to control power delivered by the alternating current source to the electrodes. The power delivery controller is configured to determine a control value from a comparison between actual power delivery as detected by a detector and a desired power delivery, and to adjust power delivery based on the control.

1 . (canceled)  
   
   
       2 . A power supply comprising: 
 an alternating current source; and    a power delivery control unit adapted to control the power delivered by the alternating current source into at least two electrical loads, the power delivery control unit comprising:    a control member that determines a control value from a comparison between actual power delivery as detected by a detector and a desired power delivery; and    an adjusting member adapted to be inserted between the alternating current source and at least one load; and    an arc management circuit that generates a control value to which the adjusting member is responsive.    
   
   
       3 . The power supply of  claim 2 , wherein the loads comprise electrodes of a plasma processing device.  
   
   
       4 . The power supply of  claim 2 , wherein the alternating current source has a bridge circuit.  
   
   
       5 . The power supply of  claim 2 , wherein the alternating current source comprises an output transformer at the output of which an alternating voltage is present, which is galvanically isolated from ground with respect to power and consists only of an alternating portion.  
   
   
       6 . The power supply of  claim 5 , wherein the output transformer has a resonant circuit on its primary side.  
   
   
       7 . The power supply of  claim 2 , wherein the adjusting member comprises at least one controllable DC voltage source.  
   
   
       8 . The power supply of  claim 2 , wherein the adjusting member comprises at least one controllable ohmic load.  
   
   
       9 . The power supply of  claim 8 , wherein the adjusting member comprises two controllable ohmic loads, separated via oppositely-directed diodes.  
   
   
       10 . The power supply of  claim 8 , wherein the ohmic loads comprise controllable semi-conductors.  
   
   
       11 . The power supply of  claim 2 , wherein the adjusting member comprises two impedances that are inductively controllable and separated via oppositely-directed diodes.  
   
   
       12 . The power supply of  claim 2 , wherein the adjusting member comprises a transformer whose primary winding is adapted to be inserted in a connecting lead between the alternating current source and one of the loads, and at whose secondary winding is provided a switching device controlled by driving signals generated from the control value by a driving circuit.  
   
   
       13 . The power supply of  claim 2 , wherein the detector comprises a measuring device for power-dependent values.  
   
   
       14 . The power supply of  claim 2 , wherein the alternating current source comprises a resonant circuit disposed downstream of the bridge circuit.  
   
   
       15 . The power supply of  claim 2 , wherein the alternating current source comprises an additional output transformer.  
   
   
       16 . The power supply of  claim 15 , wherein the output transformer is an air transformer.  
   
   
       17 . The power supply of  claim 2 , wherein the alternating current source generates an alternating current of a frequency of between about 1 kHz and 1 MHz.  
   
   
       18 . The power supply of  claim 17 , wherein the frequency is between about 50 kHz and 500 kHz.