High resolution spatial light modulation

Abstract

Methods and apparatus for providing a high-resolution spatial light modulator. A spatial light modulator includes a cell that includes: a substrate portion; a first support post and a second support post, each having a top surface; and a micro mirror. The micro mirror includes a bottom layer that includes a hinge member having a longitudinal axis, a width across the longitudinal axis, a first end on the longitudinal axis, and a second end on the longitudinal axis. The first end and second end is secured to the first support post and the second support post, respectively. The hinge member has a same thickness of the bottom layer, wherein the width of the hinge member is greater than a thickness of the bottom layer.

1 . A method for making a spatial light modulator, the method comprising: 
 forming a control substrate;    forming a first support post and a second support post on the substrate;    forming a layer of amorphous silicon by vapor deposition of amorphous silicon on the substrate, wherein a thickness of the layer is controlled by controlling the vapor deposition; and    patterning the layer to form a bottom layer of a micro mirror, the bottom layer including a hinge member about which the micro mirror is configured to tilt, the hinge member having a first end secured to the first support post and a second end secured to the second support post.    
     
     
         2 . The method of  claim 1 , further comprising planarizing the layer of amorphous silicon.  
     
     
         3 . The method of  claim 1 , further comprising: 
 forming a middle layer of the micro mirror on the bottom layer, the middle layer including a recess configured to accommodate the hinge member; and    forming a reflective top layer of the micro mirror on the middle layer.    
     
     
         4 . The method of  claim 1 , further comprising: 
 forming a plurality of electrodes on the control substrate; and    forming a plurality of vertical landing tips on the control substrate.    
     
     
         5 . The method of  claim 4 , wherein forming a plurality of electrodes includes forming step electrodes.  
     
     
         6 . The method of  claim 4 , wherein forming a plurality of vertical landing tips includes forming vertical landing tips having a top horizontal portion that is configured to contact the bottom layer when the micro mirror is tilted.  
     
     
         7 . The method of  claim 1 , further comprising forming a hinge support frame to buttress the support posts, the hinge support frame being completely hidden underneath the micro mirror.