Polishing pad having hollow fibers and the method for making the same

Abstract

The invention relates to a polishing pad having hollow fibers and a method for making the same. The polishing pad comprises a body and a plurality of hollow fibers. The body has a polishing surface. The hollow fibers are located within the body and have an opening on the polishing surface, wherein the hollow area of the section of each hollow fiber is larger than the sectional area of polishing particles in a polishing slurry. Therefore, the polishing slurry and polishing particles achieve a thorough circulation on the polishing pad via the hollow fibers.

1 - 10 . (canceled) 
     
     
         11 . A method for making a polishing pad having hollow fibers, the method comprising the steps of:
 (a) providing a plurality of hollow fibers;   (b) vertically arranging the hollow fibers on a substrate;   (c) forming a body to cover the hollow fibers; and   (d) removing the substrate to form a polishing pad, wherein the polishing pad has the body and the hollow fibers and a height of the body is greater than a height of the hollow fibers.   
     
     
         12 . The method as claimed in  claim 11 , wherein in step (b), the hollow fibers are vertically distributed on the substrate uniformly. 
     
     
         13 . The method as claimed in  claim 11 , wherein in step (b), the hollow fibers are arranged in a plurality of concentric circles. 
     
     
         14 . The method as claimed in  claim 11 , wherein in step (b), the hollow fibers are arranged in a “#” shape. 
     
     
         15 . The method as claimed in  claim 11 , wherein in step (b), the hollow fibers are arranged on the substrate by using an electrostatic adsorption method.