Probe cleaner and cleaning method

Abstract

A probe cleaner for removing foreign objects from the tip part of a probe is formed with a cleaner sheet having a surface part with microfibers and abrading particles affixed to the surface of the microfibers at this surface part. The average fiber diameter of the microfibers is in the range of 0.1 μm or more and 20 μm or less. The average particle diameter of the abrading particles is in the range of 0.05 μm or more and 3.0 μm or less. For cleaning the tip part of a probe, the probe cleaner is set to the surface of a table, the tip part of the probe is caused to penetrate inside the surface part, and the probe is caused to undergo a reciprocal motion in the direction of the thickness of the surface part.

1 . A probe cleaner for removing foreign objects attached to the tip part of a probe, said probe cleaner comprising: 
 a cleaner sheet having a surface part with microfibers; and    abrading particles affixed to the surface of the microfibers at said surface part.    
     
     
         2 . The probe cleaner of  claim 1  wherein said microfibers have average fiber diameter in the range of 0.1 μm or more and 20 μm or less.  
     
     
         3 . The probe cleaner of  claim 1  wherein said microfibers have average fiber diameter in the range of 0.1 μm or more and 10 μm or less.  
     
     
         4 . The probe cleaner of  claim 1  wherein the average particle diameter of said abrading particles is in the range of 0.05 μm or more and 3.0 μm or less.  
     
     
         5 . The probe cleaner of  claim 1  wherein said abrading particles include particles of one or more kinds selected from the group consisting of alumina, silicon carbide, silicon oxide, zirconia, aluminum hydroxide and diamond.  
     
     
         6 . The probe cleaner of  claim 1  wherein said cleaner sheet is a flocked sheet having said microfibers planted on the surface of a base sheet.  
     
     
         7 . The probe cleaner of  claim 1  wherein said cleaner sheet is a woven or non-woven cloth sheet comprising said microfibers.  
     
     
         8 . The probe cleaner of  claim 1  wherein said probe has indentations or protrusions at the tip.  
     
     
         9 . A method of removing foreign objects from the tip part of a probe, said method comprising the steps of: 
 setting a probe cleaner to the surface of a table, said probe cleaner comprising a cleaner sheet having a surface part with microfibers and abrading particles affixed to the surface of the microfibers at said surface part;    causing said tip part of said probe to penetrate inside said surface part; and    causing said probe to undergo a reciprocal motion in the direction of the thickness of said surface part.    
     
     
         10 . The method of  claim 9  further comprising the step of pulling out said probe from said surface part.  
     
     
         11 . The method of  claim 9  wherein said reciprocal motion is caused while said tip part of said probe remains in the condition of penetrating inside said surface part.  
     
     
         12 . The method of  claim 9  wherein said probe has indentation or protrusion at said tip.