Crystallization apparatus and method, manufacturing method of electronic device, electronic device, and optical modulation element

Abstract

A manufacturing method of an electronic device includes positioning a processed substrate with respect to a substrate stage of a crystallization apparatus and supporting it with at least one positioning mark previously provided on the processed substrate being used as a references, applying a modulated light beam to a predetermined area of the processed substrate supported by the substrate stage and crystallizing the area, and forming at least one circuit element in the crystallized area of the processed substrate subjected to positioning with the positioning mark being used as a reference.

1 . A method for manufacturing an electronic device in an area of a processed substrate crystallized by a crystallization apparatus, 
 the crystallization apparatus comprising:    an illumination system which projects a light beam which fuses the processed substrate;    an optical modulation element which modulates the light beam into a light beam having at least one light intensity distribution changed from a minimal light intensity to a maximal light intensity; and    a substrate stage which is provided at a position which the light beam transmitted through the optical modulation element strikes, and supports the processed substrate,    the manufacturing method comprising:    positioning the processed substrate with respect to the substrate stage of the crystallization apparatus and supporting it with at least one positioning mark previously provided on the processed substrate being used as a references;    applying the modulated light beam to a predetermined area of the processed substrate supported by the substrate stage and crystallizing the area; and    forming at least one circuit element in the crystallized area of the processed substrate subjected to positioning with the positioning mark being used as a reference.    
   
   
       2 . The manufacturing method of an electronic device according to  claim 1 , wherein the processed substrate has a non-single-crystal semiconductor film having the area which is to be crystallized.  
   
   
       3 . An electronic device manufactured by the manufacturing method of an electronic device according to  claim 1.