Latching micro-regulator

Abstract

A latching microregulator for regulating liquid flow on micro-scale levels comprises a substrate having an inlet port and an outlet port, a valve element defining a valve chamber for opening and closing the inlet port, and an actuator assembly for actuating the valve element. The valve chamber is configured to contain a volume of fluid, and the inlet port and the outlet port are in fluid communication with the valve chamber to provide a liquid flow path through the chamber. The actuator assembly comprises a cantilever beam for moving the valve element between an open position and a closed position, an actuator, such as a piezoelectric element, for moving the cantilever beam, and a latch, such as a permanent magnet, for securing the cantilever beam in the closed position. A flow regulation system comprises a plurality of fluid channels of varied flow conductance and a plurality of latching microregulators for selectively blocking or allowing flow through each of the fluid channels.

1 . A method of manufacturing a valve for controlling fluid flow through a channel, comprising the steps of: 
 providing a substrate having an inlet port extending to a surface of the substrate in communication with the channel and an outlet port extending to the surface of the substrate in communication with the channel; and    coupling an actuator assembly having a valve seat to the surface of the substrate, wherein the valve seat includes a first protrusion for selectively blocking one of said inlet ports and said outlet ports.    
   
   
       2 . The method of  claim 1 , wherein the valve seat comprises a flexible membrane portion having a rim that sealingly contacts the substrate to define a valve chamber in communication with the inlet port and the outlet port for containing a volume of fluid.  
   
   
       3 . The method of  claim 1 , wherein step of coupling an actuator assembly comprises attaching and hinging a first end of a cantilever beam to the substrate.  
   
   
       4 . The method of  claim 3 , further comprising the step of coupling a latching mechanism to at least one of the substrate and the actuator assembly.  
   
   
       5 . The method of  claim 4 , wherein the step of coupling the latching mechanism comprises coupling one of a magnet and a permalloy element to the surface of the substrate and the other of the magnet and the permalloy element to a second end of the cantilever beam, such that the magnet and permalloy element mate when the second end of the cantilever beam is brought into proximity with the surface of the substrate.  
   
   
       6 . The method of  claim 3 , further comprising the step of coupling an actuator to the cantilever beam.  
   
   
       7 . The method of  claim 6 , wherein the actuator comprises a piezoelectric element.  
   
   
       8 . The method of  claim 3 , wherein the valve seat includes a second protrusion external to the valve chamber for contacting the cantilever beam, wherein the cantilever beam pushes on the second protrusion to move the valve seat to a closed position.  
   
   
       9 . A method of manufacturing a valve for controlling fluid flow through a channel, comprising the steps of: 
 providing a substrate having an inlet port extending to a surface of the substrate in communication with the channel and an outlet port extending to the surface of the substrate in communication with the channel; and    coupling a valve seat to the surface of the substrate, wherein the valve seat defines a valve chamber exterior to the substrate in communication with the inlet port and the outlet port for containing a volume of fluid.    
   
   
       10 . The method of  claim 9 , wherein the valve seat comprises a flexible membrane portion having a rim that sealingly contacts the substrate to define the valve chamber.  
   
   
       11 . The method of  claim 10 , wherein the valve seat includes a first protrusion extending from the membrane portion into the valve chamber to selectively block one of the inlet port and the outlet port.  
   
   
       12 . The method of  claim 11 , wherein the valve seat includes a second protrusion external to the valve chamber.  
   
   
       13 . The method of  claim 12 , further comprising the step of attaching and hinging a cantilever beam to the substrate, with the hinge spaced from the valve seat such that the cantilever beam selectively pushes on the second protrusion to move the valve seat to a closed position.  
   
   
       14 . The method of  claim 13 , further comprising the step of coupling a piezoelectric actuator to the cantilever beam.  
   
   
       15 . The method of  claim 9 , further comprising the step of coupling an actuator assembly for selectively moving the valve seat between an open position, in which liquid flows through the valve chamber, and a closed position, in which the valve seat blocks liquid from flowing through the valve chamber.  
   
   
       16 . The method of  claim 15 , further comprising the step of coupling a latching mechanism to at least one of the substrate and the actuator assembly.  
   
   
       17 . The method of  claim 16 , wherein the step of coupling the latching mechanism comprises coupling one of a magnet and a permalloy element to the surface of the substrate and the other of the magnet and the permalloy element to an end of the actuator assembly.  
   
   
       18 . A method of manufacturing a valve for controlling fluid flow through a channel, comprising the steps of: 
 providing a substrate having an inlet port extending to a surface of the substrate in communication with the channel and an outlet port extending to the surface of the substrate in communication with the channel and a magnet coupled to the exterior surface spaced from the inlet port and outlet port; and    attaching a first end of a cantilever beam to the exterior surface of the substrate, such that a second end of the cantilever beam is brought into proximity with the magnet when the cantilever beam is lowered towards the substrate.    
   
   
       19 . The method of  claim 18 , further comprising the step of coupling a valve seat to the exterior surface of the substrate, wherein the valve seat includes a first protrusion for selectively blocking one of said inlet ports and said outlet ports and the cantilever beam selectively moves the valve seat between an open position and a closed position.  
   
   
       20 . The method of  claim 18 , further comprising the step of coupling a permalloy element to the second end of the cantilever beam.