Optical scanning microscope

Abstract

Microscope, in particular an optical scanning microscope with illumination of a specimen via a beam splitter, which is arranged in an objective pupil and includes at least a reflecting first portion and at least a transmitting second portion, whereby the reflecting portion serves to couple in the illumination light and the transmitting portion serves to pass the detection light in the detection direction or the transmitting portion serves to couple in the illumination light and the reflecting portion serves to couple out the detection light, with a first scanning arrangement. Means are provided in the detection light path for the overlay of at least one further scanning arrangement for illumination and detection.

1 . An optical scanning microscope comprising: 
 a source of illumination light,    an objective pupil,    a beam splitter for illuminating a specimen with the illumination light, the beam splitter being arranged in the objective pupil and including at least one reflecting first portion and at least one transmitting second portion, wherein one of the first and second portion couples in the illumination light and the other of the, first and second portion passes detection light in a detection direction,    a first scanning arrangement for scanning the illumination light onto the beam splitter, and    at least one further scanning arrangement for illumination and detection, provided in the detection light path.    
   
   
       2 . An optical scanning microscope comprising: 
 a source of illumination light,    an objective pupil,    a beam splitter for illuminating a specimen with the illumination light, the beam splitter being arranged in the objective pupil and including at least one reflecting first portion and at least one transmitting second portion, wherein one of the first and second portions couples in the illumination light and the other of the first and second portion passes detection light in a detection direction, and wherein the beam splitter has a side facing towards the specimen and a side facing away from the specimen,    a first scanning arrangement for scanning the illumination light onto the beam splitter,    a detection unit for detecting specimen light from the first scanning arrangement,    at least one further scanning arrangement coupled in via the beam splitter, and    returning means for detouring of a part of the specimen light at the side of the beam splitter facing away from the specimen and for then returning the detoured specimen light toward the detection unit for detecting specimen light from the first scanning arrangement.    
   
   
       3 . An optical scanning microscope comprising: 
 a source of illumination light,    an objective pupil,    a beam splitter for illuminating a specimen with the illumination light, the beam splitter being arranged in the objective pupil and including at least one reflecting first portion and at least one transmitting second portion, wherein one of the first and second portion couples in the illumination light and the other of the first and second portion passes detection light in a detection direction,    a first scanning arrangement for scanning the illumination light onto the beam splitter, the first scanning arrangement having at least one scan mirror, the scan mirror having a reflecting rear side,    at least one further scanning arrangement coupled in via the beam splitter, and    returning means for directing at least one part of the specimen light to the reflecting rear side of the scan mirror for return in the detection direction.