Polymer bulk acoustic resonator

Abstract

A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied to the first thin film electrode layer; and a second thin film electrode layer applied to the thin film electro-active polymer layer.

1 . A method of making a polymer bulk acoustic resonator comprising; 
 applying a first thin film electrode layer to a semiconductor layer;    applying a thin film electro-active polymer layer to the first thin film electrode layer, by evaporating a stoichiometrically balanced monomer sample on said first thin film electrode layer;    annealing said evaporated sample which has been applied to said first thin film electrode layer; and    applying a second thin film electrode layer applied to the thin film electro-active polymer layer.    
   
   
       2 . The method of  claim 1 , further including poling said thin film electro-active polymer layer after annealing to impart piezoelectric activity;  
   
   
       3 . The method of  claim 1 , further including applying alternating layers of metal film and polymers to said first thin film electrode layer before applying said thin film electro-active polymer layer to form a reduced Bragg Reflector between said first thin film electrode layer and said thin film electro-active polymer layer.  
   
   
       4 . A method of making a polymer bulk acoustic resonator comprising; 
 applying a first thin film electrode layer to a semiconductor layer;    applying a thin film electro-active oligomer layer to the first thin film electrode layer; and    applying a second thin film electrode layer applied to the thin film electro-active polymer layer.    
   
   
       5 . The method of  claim 4 , further including applying alternating layers of metal film and polymers to said first thin film electrode layer before applying said thin film electro-active polymer layer to form a reduced Bragg Reflector.  
   
   
       6 . The method of  claim 4 , wherein said thin film electro-active oligomer layer is applied to said first thin film electrode layer by a method of thermal evaporation, whereby oligomers are placed in a crucible and heated to above room temperature and said first thin film electrode layer is held at a temperature near room temperature or below.  
   
   
       7 . The method of  claim 4 , wherein said thin film electro-active oligomer layer is applied to said first thin film electrode layer by using a spin cast techniques.  
   
   
       8 . The method of  claim 4 , further including poling said thin film electro-active oligmor layer to impart piezoelectric activity.  
   
   
       9 . A method of making a polymer bulk acoustic resonator comprising; 
 applying a first thin film electrode layer to a semiconductor layer;    applying a polymer electret thin film layer to the first thin film electrode layer; and    applying a second thin film electrode layer applied to the thin film electro-active polymer layer.    
   
   
       10 . The method of  claim 9 , wherein said polymer electret thin film layer is applied as a bilayer film with each layer having a different elastic modulus.  
   
   
       11 . The method of  claim 9 , wherein said polymer electret thin film layer is applied as a bilayer film with each layer having a different thickness.  
   
   
       12 . The method of  claim 9 , further including poling said polymer electret thin film layer to impart piezoelectric activity;  
   
   
       13 . A method of making a polymer bulk acoustic resonator comprising; 
 applying a first thin film electrode layer to a semiconductor layer;    applying a thin film electro-active polymer layer to the first thin film electrode layer; and    applying a second thin film electrode layer applied to the thin film electro-active polymer layer.    
   
   
       14 . The method of  claim 13 , further including applying alternating layers of metal film and polymers to said first thin film electrode layer before applying said thin film electro-active polymer layer to form a reduced Bragg Reflector between said first thin film electrode layer and said thin film electro-active polymer layer.