Macroparticle-filtered coating plasma source device

Abstract

A plasma source is designed with a starting rod to reduce target vapor shielding. A curve ion duct has reverse thorns on its inner wall to filter macroparticles in plasma. The curve ion duct has duct segments and each duct segment has an individual electricity. The present invention increases ion amount, acquires a film through high energy ions, and obtains enhanced film adhesion and film quality.

1 . A macro particle-filtered coating plasma source device, comprising:
 a plasma source;   a curve ion duct, said curve ion duct connecting with said plasma source at an end;   a controller;   an arc source; and   a multi-channel power source,   wherein said curve ion duct comprises a plurality of duct segments and said duct segment has an individual electricity.   
   
   
       2 . The device according to  claim 1 ,
 wherein said plasma source is exhausted through an opening to obtain a vacuum; and   wherein said opening is located on a place selected from a group consisting of a wall of said curve ion duct and a wall surrounding said target.   
   
   
       3 . The device according to  claim 1 ,
 wherein said plasma source has a target, a trigger rod and a guiding rod.   
   
   
       4 . The device according to  claim 3 ,
 wherein said target is made of a material selected from a group consisting of a solid metal, a metal alloy, graphite, silicon, boron metal oxide, a metal oxide, a metal carbide, a silicide and a metal silicide.   
   
   
       5 . The device according to  claim 1 ,
 wherein said duct segment is curved, said duct segment has a radius between 3 and 50 centimeters (cm), and two flanges at two ends of said duct segment obtains an angle between 100 and 180°.   
   
   
       6 . The device according to  claim 1 ,
 wherein said duct segment has a cooling water channel, an electromagnetic coil and a water-and-electricity fast connector.   
   
   
       7 . The device according to  claim 1 ,
 wherein each two neighboring said duct segments are connected by fixing on a flange having a member selected from a group consisting of a screw hole, a buckle and a plurality of bolts and rabbets.   
   
   
       8 . The device according to  claim 1 ,
 wherein said duct segment obtains an electrical polarity through a connection selected from a group consisting of a floating connection, a anode connection and a cathode connection.   
   
   
       9 . The device according to  claim 1 ,
 wherein an electrical output for each duct segment is adjusted by said multi-channel power source;   wherein said multi-channel power source obtains an ion source by swiftly changing among said duct segments between a bias power source and a power source of an electromagnetic coil; and   wherein said ion source is selected from a pulse ion source and a direct-current ion source.   
   
   
       10 . The device according to  claim 1 ,
 wherein an electrical insulating plate is located between every two neighboring said duct segments to obtain a high-energy ion source.   
   
   
       11 . The device according to  claim 1 ,
 wherein said duct segments are assembled with an arrangement selected from a group consisting of a 2-dimensional arrangement and a 3-dimensional arrangement.   
   
   
       12 . The device according to  claim 1 ,
 wherein said curve ion duct is cooled down with a cooling water;   wherein said curve ion duct has an electromagnetic field guidance; and   wherein said curve ion duct has reverse thorns on an inside wall surface of said curve ion duct.   
   
   
       13 . The device according to  claim 12 ,
 wherein said reverse thorns are located on said inside wall in a way selected from a group consisting of forming a plurality of circles and being distributed randomly;   wherein each said reverse thorn has a sharp-triangle shape;   wherein an included angle between a front surface of said reverse thorn and said inside wall surface of said curve ion duct has a degree between 10 degrees (°) and 90°; and   wherein a sharp angle of said reverse thorn has a degree between 20° and 90°.   
   
   
       14 . The device according to  claim 11 ,
 wherein said reverse thorn has a triangle height between 0.1 millimeter (mm) and 10 mm; and   wherein a distance between two neighboring reverse thorns is shorter than a half of a triangle height of said reverse thorn.   
   
   
       15 . The device according to  claim 1 ,
 wherein said multi-channel power source comprises a plurality of power channels.   
   
   
       16 . The device according to  claim 1 ,
 wherein said controller performs processes of:   (a) deciding when an arc is started and how long said arc is lasted;   (b) adjusting output power of each channel of said multi-channel power source;   (c) comparing said output power of said channel with a default value; and   (d) automatically adjusting said output power of said channel to obtain a best ion output.   
   
   
       17 . The device according to  claim 1 ,
 wherein a anode of said arc source is connected to a target; and   wherein a cathode of said arc source is connected to a position selected from a group consisting of a wall surface of said plasma source, a duct segment of said curve ion duct, a flange at an exit of said curve ion duct, and a combination of the above positions.